SiO2 sputtering

Dear labmembers,

Is there anyone who did SiO2 sputtering before? I am developing my
process for sputtered ~10 nm SiO2. I am concerning the roughness and
density of the film. I would like to get advice if some labmembers
have previous experience. Thanks.

Yoonyoung

--
Yoonyoung Chung
Ph.D. Candidate
Department of Electrical Engineering
Stanford University

Email: yoonyoung.chung@stanford.edu
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Final judge is by Nature itself