Chilled water valve to the heat exchanger is stuck on. This water along with the heater help regulate the coolant water temperature to the set value (80 C). Could not find a replacement valve. We will try again next week. In the mean time I paritally closed the incoming water valve to enable the heat exchanger to heat up closer to the set point. Monitored temperature for 4 hours, it was stable at ~ 76 C. This heat exchanger only regulates the chamber wall temperature. The heat exch for the electrodes are all OK.
Please check heat exchanger temperature prior to processing your wafers. Go to SYSTEM ----> MONITOR FACILTIES ------> Heat Exchanger Frame
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