Thursday, July 3, 2008

Re: Problem p5000etch SNF 2008-07-03 01:03:38: Wafer is stuck in chamber A

Recoved the user's wafer. Tried to cycle 10 wafers but the robot faulted 4 times for an encoder error.
Re-positioned two KF-50 vacuum clamps directly underneath the robot. Now have cycled 22 wafers without any problems. Will continue to cycle wafers.

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