I used to 950c for 30 min and Wet ox 15 min at 1000C and able to get 40Ohms/Sq. Even though my last run was came out high like around 150Ohms/Sq which was 3 weeks ago.
There is some thing goig on with the tube,need to be fixed.
Pradeep
On 3/3/10, Lele Wang <lelewang@stanford.edu> wrote:
Hi all,
Has anyone used tylan5 for predeposition of boron and measured the right sheet resistance? I did a predeposition at 1000 degree for 30 minutes, but get an unexpected high sheet resistance, about 800 OHMS/SQ. Then I did a dry oxidation at 900 degree for 30 minutes and did a BOE etching for 1 minute, but the resistance is still high, about 800 OHMS/SQ, should be less than 100 OHMS/SQ. What are the right steps before measure the resistance? Thanks.
Best,
Lele
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