The robot arm extension teflon gear drive is worn out causing
to much play during extension transfer and at the same time
also causing the wafer in the blade pocket to moved and intermittently
rotate. Also, we a have problem with chamber B slit door actuator
valve it intermttiently opened to fast causing it slammed down creating
vibration causing the wafer on chamber B to moved, i'm currently
working on all this problem...
Saturday, March 20, 2010
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