Friday, October 23, 2009

Comment p5000etch SNF 2009-10-23 16:14:17: CH B Etch Rate Qual

Etch rate Ox = 3063A/min
ER PR = 1521
ER Nitride = 3024
Selectivity Ox : Nitride = 1.01 : 1
Sel Ox:PR = 2.0 : 1
Sel SiN : PR = 2.0 : 1
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