Tuesday, November 11, 2008

Shutdown p5000etch SNF 2008-11-11 11:32:00: Wafer stuck in slit valve - precarious position

While the wafer was coming out to the cassette holder it got stuck in the slit valve. Wafer is is precarious position, so please be careful not to break wafer. Leaving behind container to keep wafer after removal from P5000. Thanks

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