Wednesday, November 12, 2008

Re: Shutdown p5000etch SNF 2008-11-11 11:32:00: Wafer stuck in slit valve - precarious position

Recovered the user's wafer and placed in his wafer container. Cycled 24 wafers using Ch.B Timed recipe with no problems. Will continue to cycle wafers.
Posted by at

No comments:

Post a Comment

Subscribe to: Post Comments (Atom)