VACUUM TRAINING SEMINAR
at Stanford University
Hosted by Fritz Prinz Group‐Rapid Prototyping Lab
Sponsored by the Kurt J Lesker Company
Monday, November 10 th 3‐6pm
Building 300, Room 300
Room 300 is on the first floor of the building, and there is an entrance to the room on each side of the building.
This is FREE to attend. Drinks and snacks will be provided. Here is an outline of the vacuum training seminar.
Topic: Vacuum Technology 2 - Mike McKeown -KJLC Chief Vacuum Scientist
I. GAS-SURFACE INTERACTIONS
Large Scale
Adsorption-Desorption
Diffusion-Permeation
Micro Scale
Specular Reflection
Diffuse Reflection
Cos Distribution
Sticking (Sorption)
Outgassing
Sources
Composition
II. BASIC PUMPING CONCEPTS
Conductance
Pumping Speed
Combining Conductance with Pumping Speed
Effective Pumping Speeds
Calculating EPS
Measuring EPS
III. GAS LOAD
Meaning of Gas Load
Units of Gas Load
Sources of Gas Load
Tests for Gas Load
Reducing Gas Load
IV. THROUGHPUT
Meaning of Pump Throughput
Units of Pump Throughput
Increasing Pump Throughput
V. EQUATING GAS LOAD AND THROUGHPUT
Calculating Base Pressures
Calculating Working Pressures
VI. VacTran® VACUUM MODELING PROGRAM
Vacuum System's Performance
Making 'What If?' Change
Contact SHAWN JONES shawnj@lesker.com (209) 401‐6453 with any questions/comments.
Sponsored by the KURT J LESKER COMPANY
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