Sunday, November 30, 2008
Comment p5000etch SNF 2008-11-30 13:28:06: Re: RF power error in Ch C
Friday, November 28, 2008
Problem p5000etch SNF 2008-11-28 11:16:50: RF forward power error in ch. C
Thursday, November 27, 2008
Problem p5000etch SNF 2008-11-27 11:49:26: process stopped in ch.c
Panel Discussion - "Perspectives in High-Tech Electronics Industry"
Dear all,
PSA-BA would like to cordially invite you to its first event of the year - "Perspectives in High-Tech Electronics Industry". This event will be a panel discussion with two successful entrepreneurs, Ramin Farjad and Shahriar Rabii, followed by an extended Q&A and reception. Come to hear about the challenges they have faced and their vision for the electronics industry in the next decade.
When: Thursday December 4th, 6pm
Where: CIS-X 101
Speakers:
Ramin Farjad co-founded Aquantia where he serves as the company's Chief Architect. He is also a founding member of Velio communications which was later acquired by Rambus. Dr. Farjad has established himself as a leading architect of high performance, high bandwidth communications circuits. He holds Master's and Ph.D. degrees in Electrical Engineering from Stanford University.
Shahariar Rabii co-founded Arda Technologies in October 2006 and serves as the company's CEO. Dr. Rabii has 20 years of experience in design, research, manufacturing and marketing of electronics. Most recently, he was a founder of Aeluros (now part of NetLogic), where he had responsibility for engineering and business development on multiple products. Before co-founding Aeluros, he led the group at Atheros Communications. Dr. Rabii holds a Ph.D. degree in Electrical Engineering from Stanford University. He was a visiting lecturer at Stanford University from 1999 to 2001 and holds 8 patents.
Hope to see you there,
The PSA-BA board
Friday, November 21, 2008
Cleantamination Meeting Reminder: Today, Friday, 3 pm
A reminder of the Contamination/Cleanliness (Cleantamination) meeting
today at 3 pm in CIS 101. The topics will be:
- quantitative methods of contamination analysis
- cleanliness policies on amtetcher and sts dep
- update from working groups
Your SNF Staff
--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang@stanford.edu
http://snf.stanford.edu
Thursday, November 20, 2008
thick oxide on silicon
Does anyone have any recommendations of vendors or companies that might be able to provide 5 microns of thermal oxide on silicon wafers at a good price?
The other question I have is would anyone be interested in purchasing thick thermal oxide on silicon with me? I have contacted a company, but their minimum order is 25. I don't need so many, so if someone is interested in perhaps a few of the wafers, please do let me know, and we can try to work something out.
Thanks,
Xiao Hann
Mechanics of Surface Effects in Nanoscale Device-Making and Manufacturing
Department of Mechanical Science and Engineering
University of Illinois at Urbana-Champaign
Urbana, IL 61801, USA
Nanoscale science and technology has been an important frontier in research and development in the past decade. Miniaturization is the major driving force behind these research activities. As the characteristic dimensions of devices and MEMS/NEMS components become smaller, however, the surface to volume ratio of these components increases significantly. Consequently, many surface phenomena, such as capillary interactions and surface adhesion, become increasingly important. Many scientific issues of these phenomena can be best understood using a mechanics approach. In this talk, I will use two particular case studies to demonstrate that mechanics can indeed be a powerful tool to help understand these phenomena and provide guidance for nanomanufacturing and device-making. One case study considers the self-assembling process of a 3-D photovoltaic device made of thin silicon foil. The other studies the collapse of PDMS contact printing stamps. In both cases, models were developed to help understand the mechanisms controlling the behavior of these processes. Critical parameters emerge naturally from these analyses which can be used to guide the device formation and manufacturing of nanoscale components.
About the Speaker: Dr. K. Jimmy Hsia is Professor of Mechanical Science and Engineering at the University of Illinois at Urbana-Champaign where he has been on the engineering faculty for the past 16 years. He received his B.S. in Engineering Mechanics from Tsinghua University, Beijing, China, and his Ph.D. in Mechanical Engineering from MIT. He has been a Visiting Scientist at the Max-Planck Institute for Metals Research in Stuttgart, Germany, a Visiting Professor at Nagoya University in Japan, and a Visiting Professor at Shenyang National Laboratory for Materials Research in China. His research interests include deformation and failure mechanisms of materials at ambient and elevated temperatures, nano/micromechanics of materials, and nanoscale phenomena in biomaterials. He has served as Guest Editor/Co-Editor for several special issues of Materials Science and Engineering. He is recipient of an NSF Research Initiation Award, a Max-Planck Society Scholarship, and a Japan Society for Promotion of Science Fellowship. From 2005-2007, Jimmy Hsia served as the Founding Director of Nano and Bio Mechanics & Materials Program in the Directorate for Engineering at the National Science Foundation (NSF). At NSF, he was actively involved in establishing the initiative of "Cellular and Biomolecular Engineering" for the new Office of Emerging Frontiers in Research and Innovation. He also participated in the Interagency Modeling and Analysis Group (IMAG) involving NSF, NIH, NASA, and DoE programs, and other multi-agency activities. Jimmy Hsia returned to teaching at the University of Illinois in Fall of 2007. He has been named an Associate of Center for Advanced Study at UIUC since August of 2008.
职业厂长的核心管理技能提升
Firefox 3 ...
When I recently asked about problems with Mozilla hanging, I heard from
a number of you about problems with Firefox crashing frequently ...
particularly when visiting sites such a gmail.google.com.
A bit of study indicated that Firefox 3 has resolved a number of these
issues. As a result, I've now installed Firefox 3 on the Sunrays in the
lab and it will be the browser that you get either if you issue the
command "firefox" at the command prompt or if you click the Firefox icon
in the menus. (Note: if you still want/need to run the old version, you
can issue the command "firefox2".) The first time that you fire up the
new Firefox 3, it will show you a License Acceptance window and then
likely ask if you'd like that to be your default browser.
I'd like to thank Tom O'Sullivan, Kelley Riviore, Joey Doll, Albert Lin
and Nahid Harjee for doing some advance testing of Firefox 3 for me.
Let me know if you encounter any problems but I'm hopeful that this will
improve the Firefox experience for many of you.
Happy browsing,
John
Wednesday, November 19, 2008
Coral "issues" .....
Sigh .... we've had some Coral outages this week .... and for that I
apologize. Let me explain the set of thing that has happened and their
status:
Recently (well, for the past few days) a number of you have noticed that
Coral clients in the lab will occasionally fail to indicate that a tool
has been enabled or disabled. In other words, the clients occasionally
fail to update. For about a week, the part of Coral that sends out
these notifications to all of the local clients has been getting hung up
during times of high activity. Once this has gotten hung up, we need to
restart the Coral servers. As a result, the Coral servers have been
restarting 3 to 4 times per day. Note: if we aren't around to restart
the servers, there is an automatic means of determining that the servers
are hung so that even if Bill or I are not around, the servers will
restart themselves after a while.
Interestingly, the part of Coral that has been getting hung up is code
that has not been changed in probably 5 years. Also, the version of
Java that we are running has not been updated in a number of months. It
seems as if this must be related to some underlying networking problem
at the socket level .... but the cause has certainly been perplexing.
Earlier this afternoon, however, we heard reports that people couldn't
get in on Remote Coral. This turned out to be a hardware failure of our
4-channel network card. To replace the card we had to take the Coral
servers down which, of course, prevented local Coral sessions from running.
But at this point (5:35 p.m. on Wednesday) the Coral servers are back
up, the network card has been replaced, and both local and remote Coral
sessions seem to be functioning properly.
Were our problems with the event server that caused the server restarts
and the client update problems earlier this week due to some early
problems with the network card that completely failed this afternoon?
We don't yet know .... but we are monitoring closely.
If the Event Manager continues to hang this week, however, we are
prepared to move the Coral servers onto a new platform. To do this will
require a planned outage of Coral early Saturday morning with a planned
outage extending from about 4 a.m. to 7 a.m. We will send out another
announcement, however, if we need to follow through on that this weekend.
We apologize for these inconveniences .... Team Coral tries hard to
deliver good availability and we know that access has been less reliable
than normal this week.
Thank you for your continued support,
John
Lost Wafer...
Hi All,
I was processing several wafers at the litho svgcoat area today from 1:45-2:30pm or so, and seem to have lost one wafer. If you happened to grab an extra wafer with a 1cm x 1.5cm piece of nickel foil kapton-taped to it, please let me know. Thanks,
Kevin
kcrabb@stanford.edu
Friday 11/21, 12pm McCullough 115. Photonic Crystal Devices for Classical and Quantum Information
Stanford Nanoscience &Nanotechnology Society Seminar
Photonic Crystal Devices for Classical and Quantum Information
Andrei Faraon (Jelena Vuckovic group )
When: Friday Nov. 21th 12pm
Where: McCullough Rm 115
Free Food (pizza) served at 11:45am
For more information please visit http://nanosociety.stanford.edu
Reminder: OSA/SPIE Seminar (TOMORROW): OSA Traveling Lecturer Yannick Lize / Stratalight - Thurs. 11/20, 4pm, Ginzton AP 200
The Optical Society of America/SPIE Stanford Student Chapter presents:
"Optical Fibers: From next generation telecom networks and enabling devices, to high power fiber lasers for industrial applications."
Speaker: Yannick Lize
Thursday, November 20
4:15pm, Ginzton Building, AP200
Refreshments at 4:00pm
Abstract: The most common application of optical fibers is in telecom systems. From transoceanic and transcontinental to metropolitan communications, fiber optic systems deliver voice and data content with at high speed with unprecedented quality. Nowadays fiber optics usage is even getting economical enough to be a serious contender to copper wires and cable in intra-office communication and fiber to the home delivery. In this presentation, we discuss next generation ultra high speed 40Gb/s and 100Gb/s optical fiber communication systems and the devices that enable them from the point of view of an optical sub-system company. We'll also discuss alternative uses of optical fibers, such as high power fiber laser for laser cutting and welding in industrial applications.
About our speaker: Dr Yannick Keith Lize obtained the BSc in Applied Physics from Concordia University in Montreal and the M.Sc. in physics from École Polytechnique. His PhD thesis on optical differential phase shift keying (DPSK) generation, transmission and demodulation was done at École Polytechnique de Montreal under Prof. Nicolas Godbout and Prof. Alan E. Willner.
As a recipient of numerous awards and fellowships, Yannick has 20 peer-reviewed publications to his credit (15 as first author), 40 papers at international conferences including 3 invited papers, as well as 5 patents. He is currently Senior Optical Designer at Stratalight Communications in Los Gatos, CA, developing 40Gb/s optical subsystems and transponders. He is a member of the OSA, IEEE LEOS, IEEE ComSoc and SPIE. Yannick is a member of the OSA Membership and Education Services (MES) council, the OSA Esther Hoffman Beller Medal Committee, the OSA Young Professional Advisory Board and an OSA travelling lecturer. He is on the technical program committees of the IEEE 7th International Conference on Optical Communications and Networks (ICOCN 2008) and the IEEE LEOS Summer Topicals 2009.
Tuesday, November 18, 2008
[Stanford Nanosociety Seminar] Friday 11/21, 12pm McCullough 115. Photonic Crystal Devices for Classical and Quantum Information
Stanford Nanoscience &Nanotechnology Society Seminar
Photonic Crystal Devices for Classical and Quantum Information
Andrei Faraon (Jelena Vuckovic group )
When: Friday Nov. 21th 12pm
Where: McCullough Rm 115
Free Food (pizza) served at 11:45am
For more information please visit http://nanosociety.stanford.edu
warning from p5000etch-pcs@snf.stanford.edu
p5000etch-pcs@snf.stanford.edu mailing list.
I'm working for my owner, who can be reached
at p5000etch-pcs-owner@snf.stanford.edu.
Messages to you from the p5000etch-pcs mailing list seem to
have been bouncing. I've attached a copy of the first bounce
message I received.
If this message bounces too, I will send you a probe. If the probe bounces,
I will remove your address from the p5000etch-pcs mailing list,
without further notice.
I've kept a list of which messages from the p5000etch-pcs mailing list have
bounced from your address.
Copies of these messages may be in the archive.
To retrieve a set of messages 123-145 (a maximum of 100 per request),
send an empty message to:
<p5000etch-pcs-get.123_145@snf.stanford.edu>
To receive a subject and author list for the last 100 or so messages,
send an empty message to:
<p5000etch-pcs-index@snf.stanford.edu>
Here are the message numbers:
2356
--- Enclosed is a copy of the bounce message I received.
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Problem p5000etch SNF 2008-11-18 13:56:52: oily substance leaking
Nano for N^3 workshop announcement
When - Thursday, December 11, 2008 (8 AM - 6 PM), Friday, December 12, 2008 (8 AM - 1 PM)
Where - Stanford University, Allen Center for Integrated Systems, Cypress conference room (CISX 101)
Local hotels - Westin Palo Alto - http://www.starwoodhotels.com/westin/property/overview/index.html?propertyID=1198
alternatives - http://www.paloaltoonline.com/lodging/
Workshop organizers - Professor Krishna Shenoy (shenoy@stanford.edu) and Professor Yoshio Nishi (nishi@ee.stanford.edu)
Registration - http://www.surveymonkey.com/s.aspx?sm=ELU8fQDmb2NyfkLhDhjIwQ_3d_3d
Goals of the workshop
Neural prostheses aim to help improve the quality of life for patients suffering from neurological disease and injury. They function by translating electrical signals from the brain (e.g., action potentials, local field potentials, ECoGs,EEGs) into control signals for guiding assistive devices. Despite considerable progress in recent years, the field actively continues to pursue
(1) increased sensor lifetime and
(2) increased system performance so that the anticipated quality-of-life improvements will clearly outweigh potential surgical risks.
Despite ongoing efforts in recent years, neither sensor lifetime nor system performance have grown at a rate necessary to dramatically enable the widespread clinical translation of these systems. MEMS-based electrode arrays have had functional lifetimes of approximately one year without substantial improvement. While flexible substrate and pharmacological agent delivery through micro-fluidic channels appears promising, there is considerable interest in understanding what nano-structured electrical and/or optical sensors which reside at the size scale of neurons (< 1 um) may enable. Similarly, system performance relies on massively parallel measurement of neural signals and MEMS based measurement has remained at roughly 100-200 neurons for the past decade. There is considerable interest in understanding what massively parallel, nano-structured electrical and/or optical sensors which could provide both the high-density measurements within one brain/neural area, and measurement from multiple brain areas separated by many centimeters may provide. Advances in both of these areas are crucial for the sustained advancement of both basic systems neuroscience which aims to provide fundamental scientific understanding of complex nervous systems, and may generate biologically-inspired computational principles for next generation electronic computational architectures - as well as more applied neuroengineering, which aims to build core technology.
The major goals of the workshop are:
- To build bridges and promote collaborations between the neuroscience, neuroengineering, neural prosthesis and nanotechnology/sensor communities.
- To identify limitations in current neural-measurement technologies and critical needs for basic neuroscience, neuroengineering, and clinical neural prostheses.
- To identify potential solutions to these needs based on recent progress in nano- and micro-technology.
- To identify how NNIN can best leverage its tools, user base and staff expertise to enable these goals.
Tentative agenda
Thursday, December 11, 2008
8:30 AM - opening remarks, Professor Yoshio Nishi, Stanford, Professor Krishna Shenoy, Stanford
9:00 AM - Professor William Newsome, Stanford University - "The Need for Measuring/Perturbing Neural Activity for Basic Neuroscience and Prostheses"
9:30 AM - Professor Jose Carmena, UC Berkeley - title TBD
10:00 AM - Professor Daryl Kipke, University of Michigan - title TBD
10:30 AM - break
11:00 AM - Professor Florian Solzbacher, University of Utah - "Next Generation Neural Interfaces - Bridging the Gap Between Engineering and Healthcare"
11:30 AM - Professor Wentai Liu, UC Santa Cruz - title TBD
12 noon - lunch
1:00 PM - Professor Mark Wrightman, UNC - "Monitoring Chemical Neurotransmission and Single Unit Activity Simultaneously"
1:30 PM - Professor Paul Garris, Illinois State University - "Toward a Smart Deep Brain Stimulator with Chemical Sensing Feedback for Control"
2:00 PM - Professor Daniel Palanker, Stanford University - "Optoelectronic Retinal Prosthesis for Restoring Sight to the Blind"
2:30 PM - Professor Ellis Meng, USC - "Hybrid Neural Interfaces and Implantable Drug Delivery Systems Enabled by BioMEMS"
3:00 PM - Professor Edward Keefer, UT Southwestern - title TBD
3:30 PM - break
4:00 PM - Professor Bruce Wheeler, University Illinois, Urbana Champaign - "Brain on a Chip: Progress in its Design and Construction"
4:30 PM - Dr. Vijendra Sahi, Nanosys Inc. - title TBD
5:00 PM - Professor Mark Schnitzer, Stanford University - title TBD
5:30 PM - Professor Karl Deisseroth, Stanford University - "Optogenetics: Development and Application"
Friday December 12, 2008
8:30 AM - Breakout group discussion - "Neuro-Nano Needs and Opportunities"
10:30 AM - break
11:00 AM - Breakout group overview - "Neuro-Nano Needs and Opportunities"
12 noon - closing remarks
Annual Lab Cleanup!
It's that time of year again. And this is just the first of several
reminders you'll receive about the annual lab cleanup. Staff will
commence cleaning up on Monday, Dec. 15 as per the following:
1. In the lab: All personal items must be stored inside assigned lab
bins. No personal items on WIP racks or on top of lab bins. Anything
found outside of lab bins will be removed from the lab.
2. Lab Bins: All assigned bins in the lab must be labeled with the
current owner's Coral login. Bins which are assigned to labmembers who
have not been very active in the lab will be tagged for reassignment to
active labmembers in the new year.
3. In the CAD room: All personal storage bins in the CAD room (CIS
151) must be labeled with the Coral login and the current date. No
chemicals inside storage bins. Staff may choose move bins around to
make better use of available space.
4. In the cubicle area: As an evacuation path for cubicle and office
occupants, aisleways must be clear to 36" across and no unsecured items
stored above (to prevent blocking paths in case of earthquake, as per
code.) Desk space may be subject to reassignment to active labmembers,
SNF student helpers and guests.
Any questions, ask a staff member --
Thanks,
Mary
"Cleantamination" Mtg, Friday, Nov. 21, 3 pm
The next Cleantamination meeting will be this Friday, Nov. 21 at 3 pm in
CIS 101. Jim McVittie will discuss quantitative methods for measurement
of contamination; we'll get an update from the various working groups;
and if supporting info is provided, we hope to review a couple of
proposals for formalizing contamination rules on amtetcher and sts dep.
For summaries of previous meetings, see:
https://spf.stanford.edu/SNF/processes/cleantamination-group
All labmembers are welcome to participate/contribute.
Your SNF Staff
Monday, November 17, 2008
Cleanroom fire article?
posted outside the SNF gowning room about a cleanroom fire which
burned a whole building to the ground. As I recall, the fire was
caused by pouring solvents into a beaker with traces of nitric acid
left in it. Does anyone know if the clipping is still around, or
where I could find a reference to the fire? I'm training young
generations of grad students who could benefit from basic safety
rules of acids and organics.
Thanks!
- Mark
Sunday, November 16, 2008
OSA/SPIE Seminar: OSA Traveling Lecturer Yannick Lize / Stratalight - Thurs. 11/20, 4pm, Ginzton AP 200
"Optical Fibers: From next generation telecom networks and enabling devices, to high power fiber lasers for industrial applications."
Speaker: Yannick Lize
Thursday, November 20
4:15pm, Ginzton Building, AP200
Refreshments at 4:00pm
Abstract: The most common application of optical fibers is in telecom systems. From transoceanic and transcontinental to metropolitan communications, fiber optic systems deliver voice and data content with at high speed with unprecedented quality. Nowadays fiber optics usage is even getting economical enough to be a serious contender to copper wires and cable in intra-office communication and fiber to the home delivery. In this presentation, we discuss next generation ultra high speed 40Gb/s and 100Gb/s optical fiber communication systems and the devices that enable them from the point of view of an optical sub-system company. We'll also discuss alternative uses of optical fibers, such as high power fiber laser for laser cutting and welding in industrial applications.
About our speaker: Dr Yannick Keith Lize obtained the BSc in Applied Physics from Concordia University in Montreal and the M.Sc. in physics from École Polytechnique. His PhD thesis on optical differential phase shift keying (DPSK) generation, transmission and demodulation was done at École Polytechnique de Montreal under Prof. Nicolas Godbout and Prof. Alan E. Willner.
As a recipient of numerous awards and fellowships, Yannick has 20 peer-reviewed publications to his credit (15 as first author), 40 papers at international conferences including 3 invited papers, as well as 5 patents. He is currently Senior Optical Designer at Stratalight Communications in Los Gatos, CA, developing 40Gb/s optical subsystems and transponders. He is a member of the OSA, IEEE LEOS, IEEE ComSoc and SPIE. Yannick is a member of the OSA Membership and Education Services (MES) council, the OSA Esther Hoffman Beller Medal Committee, the OSA Young Professional Advisory Board and an OSA travelling lecturer. He is on the technical program committees of the IEEE 7th International Conference on Optical Communications and Networks (ICOCN 2008) and the IEEE LEOS Summer Topicals 2009.
Saturday, November 15, 2008
Comment p5000etch SNF 2008-11-15 14:20:56: previous problem is for Ch.A
Friday, November 14, 2008
Problem p5000etch SNF 2008-11-14 17:10:31: resist etch rate high
Process Clinic/SpecMat - Monday, Nov. 17, 2-4 pm
The next Process Clinic is Monday, Nov. 17, from 2-4 pm in the CIS
cubicle area (near Maureen's office.) Bring your process flow
questions, layouts, and new material requests. (Experienced labmembers
are especially welcome to help with suggestions and advice!)
Your SNF staff
Thursday, November 13, 2008
Problems with Mozilla hanging?
We have been experiencing a number of "runaway" browser sessions ....
mostly mozilla but sometimes firefox. When we get several of them,
everything else (including Coral) pays the price .... so we are trying
to resolve these issues.
If you think that you are experiencing this, I'd appreciate hearing from
you if it happens when you go to a particular site. For example,
gmail.google.com used to crash Mozilla browsers ..... and it still may
happen. If a browser crashes when you go to a web site, I'd like to
hear about it because I'd like to learn if these crashes sessions become
the runaway processes that we see.
Note: in a number of cases, a plug-in like Flash can cause a browser to
crash .... although I've recently updated the Flash plug-in for both
Mozilla and Firefox to the most recent release in hopes of reducing
these problems.
In any event, if you consistently experience browser crashes ....
particularly when visiting particular sites, I'd like to hear from you.
Thanks for your help,
John
Wednesday, November 12, 2008
Re: Shutdown p5000etch SNF 2008-11-11 11:32:00: Wafer stuck in slit valve - precarious position
Tuesday, November 11, 2008
Shutdown p5000etch SNF 2008-11-11 11:32:00: Wafer stuck in slit valve - precarious position
Optical Pyrometer
Does anyone have an optical pyrometer that I can borrow briefly. I would like to check the temperature of a filament.
Thanks in advance,
Matt
Monday, November 10, 2008
Lesker Vacuum Training Seminar today
VACUUM TRAINING SEMINAR
at Stanford University
Hosted by Fritz Prinz Group‐Rapid Prototyping Lab
Sponsored by the Kurt J Lesker Company
Monday, November 10 th 3‐6pm
Building 300, Room 300
Room 300 is on the first floor of the building, and there is an entrance to the room on each side of the building.
This is FREE to attend. Drinks and snacks will be provided. Here is an outline of the vacuum training seminar.
Topic: Vacuum Technology 2 - Mike McKeown -KJLC Chief Vacuum Scientist
I. GAS-SURFACE INTERACTIONS
Large Scale
Adsorption-Desorption
Diffusion-Permeation
Micro Scale
Specular Reflection
Diffuse Reflection
Cos Distribution
Sticking (Sorption)
Outgassing
Sources
Composition
II. BASIC PUMPING CONCEPTS
Conductance
Pumping Speed
Combining Conductance with Pumping Speed
Effective Pumping Speeds
Calculating EPS
Measuring EPS
III. GAS LOAD
Meaning of Gas Load
Units of Gas Load
Sources of Gas Load
Tests for Gas Load
Reducing Gas Load
IV. THROUGHPUT
Meaning of Pump Throughput
Units of Pump Throughput
Increasing Pump Throughput
V. EQUATING GAS LOAD AND THROUGHPUT
Calculating Base Pressures
Calculating Working Pressures
VI. VacTran® VACUUM MODELING PROGRAM
Vacuum System's Performance
Making 'What If?' Change
Contact SHAWN JONES shawnj@lesker.com (209) 401‐6453 with any questions/comments.
Sponsored by the KURT J LESKER COMPANY
Thursday, November 6, 2008
Re: Problem p5000etch SNF 2008-10-10 12:18:36: disk full error will not clear.
Comment p5000etch SNF 2008-11-06 16:36:47: cleared the error
Problem p5000etch SNF 2008-11-06 14:29:04: Ch B hung up for 'waiting for wf out'
Cleanliness & Contamination Mtg - Friday, Nov. 7, 3 pm, CIS 101
You are invited to another exciting installment of the "Cleantamination"
meeting, this Friday (tomorrow) at 3 pm in CIS 101. On the agenda:
- Ed will present a review of the criteria and rationale for SpecMat
policies. Our objective is to integrate this structures into the
decision-making of this forum.
- Update from working groups (ALD, stsetch/2, testing, RTA.)
Next meeting will be in two weeks in which Jim McVittie will review
methods for quantifying contamination.
About this group: "Cleantamination" is a working group on Cleanliness
and Contamination. It is comprised of labmembers, PI's, and staff
working to facilitate process flow sequences for novel materials while
protecting against cross-contamination which affect device performance.
All members of the lab community are welcome to attend and contribute.
For summaries of the last meeting:
https://spf.stanford.edu/SNF/processes/cleantamination-group
Wednesday, November 5, 2008
[Stanford Nanosociety Seminar] Friday 11/07, 12pm McCullough 115
Sorry for any confusion in the previous email. --Linyou
Microwave Imaging at the Nanoscale -- Principles and Applications
When: Friday Nov. 7th 12pm
Where: McCullough Rm 115
Free Food (pizza) served at 11:45am
For more information please visit http://nanosociety.stanford.edu
[Stanford Nanosociety Seminar] Friday 11/07, 12pm McCullough 105
Microwave Imaging at the Nanoscale -- Principles and Applications
When: Friday Nov. 7th 12pm
Where: McCullough Rm 115
Free Food (pizza) served at 11:45am
For more information please visit http://nanosociety.stanford.edu
Venture Clinic, Thursday, 11/6, 4 pm CIS115 (note time and room change)
Shahin Farshchi, an Associate from Lux Capital, will be moderating the Venture Clinic,
which aims to provide an informal forum for researchers interested in brainstorming
with a venture capitalist on avenues for commercializing technology, and what to expect
when starting a new venture. [Particularly in this economic climate!]
Technical discussions should be limited to what has been already disclosed or published.
This will take place on Thursday, Nov. 6 at 4:00 pm in CIS 115.
For more information, contact:
Shahin Farshchi, Ph.D.
Phone: 925.323.2784
Email: shahin.farshchi@luxcapital.com
Tuesday, November 4, 2008
Low Pressure Mercury Lamp
Does anyone has a mercury lamp (with power supply) that I can borrow briefly or know where to buy?
I need a light source for my photoelectric test with wavelength below 280nm (LP Hg peak at 254nm, I guess).
Thanks in advance,
Paul
2nd MEMS Seminar This Wednesday: Diversity of MEMS Inertial Sensor Technologies. Nov. 5th, 4-5pm in CISX-101
~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~
E342 SEMINAR
(MEMS Lab2)
Wednesday, Nov. 5th, 2008
4:00 – 5:00 pm
CISX-101
Title:
Diversity of MEMS Inertial Sensor Technologies.
Speaker:
Dr. St.J. Dixon-Warren
QUALCOMM MEMS Technologies, Inc.
Abstract:
We will present recent MEMS reverse engineering results which illustrate the diversity of technologies currently used in the commercial manufacturing of MEMS inertial sensors. In comparison to CMOS, which is highly converged across the industry, a surprising range of technologies are used to fabricate accelerometers and gyroscopes, including surface micro-machined polysilicon, surface micro-machine silicon, and bulk micro-machined silicon. More recently, a thermal device has appeared on the market, which is fabricated with a CMOS process and involves no moving parts. Most inertial sensor manufacturers have adopted a two-chip solution, while a few provide integrated single chip solution. The latter provides lower cost packaging at the price of higher chip cost. The MEMS industry is poise for dramatic growth over the new few years, as inertial sensors are widely incorporated into consumer electronics and achieve greater penetration into the automotive sector. Currently, MEMS inertial sensors are manufactured by both large and small independent device manufacturers (IDM's) and by fabless design houses. A question of interest to the industry is whether we will see dramatic convergence and consolidation. This process may be accelerated by the entrance of large Asian foundries in to the MEMS manufacturing sector.
Bio.:
St.J. Dixon-Warren (Sinjin) is the manager of Chipworks Technical Intelligence Process Engineering team. He is also Chipworks leading analyst covering devices in the MEMS industry and, most recently spoke on MEMS devices. Dr. Dixon-Warren earned his PhD in Chemical Physics from the University of Toronto and spent two years as NATO Postdoctoral Fellow at the University of Cambridge and in the faculty at Washington State University. Dr. Dixon-Warren made the switch to industry with Nortel Networks Optical Components division before moving on to Chipworks as a technical analyst. Dr. Dixon-Warren is an author on more than forty research publications. He is married and has three children.
MEMS Seminar This Wednesday: Revolutionary MEMS-based Display Technology. Nov. 5th, 3-4pm in CISX-101
~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~
E342 SEMINAR
(MEMS Lab2)
Wednesday, Nov. 5th, 2008
3:00 – 4:00 pm
CISX-101
Title:
Revolutionary MEMS-based Display Technology.
Speaker:
Dr. Ana Londergan
QUALCOMM MEMS Technologies, Inc.
Abstract:
Qualcomm MEMS Technologies, Inc. has developed the industry's first MEMS display, mirasol™ displays, for mobile devices - a true technological innovation that offers low power consumption and superb viewing quality in a wide range of environmental conditions, including bright sunlight. Mirasol displays work by using a reflective technology called Interferometric Modulation (IMOD) so that specific wavelengths of light interfere with each other to create color. The phenomenon that makes a butterfly's wings shimmer is the same process used in Qualcomm's mirasol displays. The MEMS functionality provides color selection, modulation and memory that supports multimedia applications, enables superb viewing quality, and extends time between charging. The manufacture of mirasol displays leverages existing LCD manufacturing infrastructure as well as commonly used materials and tools at display foundries. Qualcomm MEMS Technologies, Inc support Qualcomm's overall strategy of increasing the capabilities of mobile devices while minimizing power consumption. Qualcomm MEMS Technologies, Inc. is headquartered in San Diego, Calif., with offices in San Jose, Calif., and Hsinchu, Taiwan.
This presentation will introduce Qualcomm MEMS Technologies, Inc. and will discuss the need for mirasol display technology. An overview of IMOD technology fundamentals and manufacturing will be presented, followed by an introduction of the QMT market focus and products.
Re: Problem p5000etch SNF 2008-11-03 20:14:06: Ch.B throwing lots of errors
Ran 36 wafers using the Ch.B oxide recipe with no problems.
Do not use cassette slots 17 - 25. Still has problem with wafer being dragged out. Need further adjustements but slot 1-16 are OK to run.
Re: Shutdown p5000etch SNF 2008-11-03 21:34:22: wafers stuck
Ran 36 wafers using the Ch.B oxide recipe with no problems.
Do not use cassette slots 17 - 25. Still has problem with wafer being dragged out. Need further adjustements but slot 1-16 are OK to run.
Re: Problem p5000etch SNF 2008-11-03 21:31:42: wafer stuck
Ran 36 wafers using the Ch.B oxide recipe with no problems.
Do not use cassette slots 17 - 25. Still has problem with wafer being dragged out. Need further adjustements but slot 1-16 are OK to run.
Monday, November 3, 2008
Problem p5000etch SNF 2008-11-03 21:31:42: wafer stuck
Cannot go back to manual
Problem p5000etch SNF 2008-11-03 20:14:06: Ch.B throwing lots of errors
-Ch. B wafer cooling helium valve not opened when recipe started
-Ch. B detected magnet fault while running step 2
-Ch. B magnet phase current total rise is too low
oh, and I think wafers are still sticking coming out of Ch. B because they don't look positioned correctly on the robot arm when they come out. one time it looked fine, another it looked about 1.5cm too far back on the arm. missed the third time it came out.
Re: Problem p5000etch SNF 2008-10-31 17:37:25: Wafer is stuck inP5000
Re: Shutdown p5000etch SNF 2008-10-31 21:33:07: i/o handler error
MEMS Packaging Seminar, Today, 11 am, CIS 101
The purpose of this talk is to give an overview of MEMS packaging
technologies developed at the Wireless Integrated Microsystems (WIMS)
center at the University of Michigan. ePack, Inc. is a spin out of the
University of Michigan—a short description of this company will be given
at the end of the talk. ePack helps companies and researchers implement
packaging technologies in order to encourage the commercialization of
their MEMS devices.
Two sets of packaging technologies will be discussed. I) Low temperature
wafer-level packaging processes for vacuum/hermeticity will be presented
including various solder bonding and localized heating technologies.
Vacuum pressures lower than 10 mTorr were achieved with yields as high
as high as 90% and 3 years of package reliability data. II) A harsh
environment robust micromechanical technology (HERMIT) for vibration,
shock and thermal isolation as well as vacuum packaging. This technology
involves flip chipping MEMS devices onto another wafer which has
specially designed vibration/shock/thermal isolation structures where
another substrate is then used for batch encapsulation of the devices.
This technology was a DARPA funded project was specially developed for
high performance gyroscopes, but can be applied to any type of MEMS device.
These technologies are a culmination of several bonding processes,
feed-through technologies and various special materials.
*Jay Mitchell* is president and co-founder of ePack Corp., a company
providing packaging services and expertise to companies and researchers
in order to bring MEMS devices to market. He finished his doctorate in
January of 2008. In the fall of 2002, he began the Ph.D. program at the
University of Michigan in mechanical engineering. In his research he
developed a Au-Si eutectic wafer-level packaging process and a low
temperature localized heating technique for the hermetic/vacuum
packaging of MEMS and microsystems. In 2000 and 2001, he worked for
Movaz Networks in the testing and design of micromirrors for
telecommunications applications. He received his B.S. and M.S. from Case
Western Reserve University in 1999 and 2000, respectively. His research
interests include: MEMS, micromachining technologies, micromachined
sensors, actuators, and micropackaging.
Sunday, November 2, 2008
Venture Clinic, Thursday, Nov. 6, 4:30 pm, CIS 101
Shahin Farshchi, an Associate from Lux Capital, will be moderating the Venture Clinic,
which aims to provide an informal forum for researchers interested in brainstorming
with a venture capitalist on avenues for commercializing technology, and what to expect
when starting a new venture. [Particularly in this economic climate!]
Technical discussions should be limited to what has been already disclosed or published.
This will take place on Thursday, Nov. 6 at 4:30 pm in CIS 101.
For more information, contact:
Shahin Farshchi, Ph.D.
Phone: 925.323.2784
Email: shahin.farshchi@luxcapital.com
Process Clinic, Monday, Nov. 3, 2-4 pm
The next Process Clinic is Monday, Nov. 3, from 2-4 pm in the CIS
cubicle area (near Maureen's office.) Bring your process flow
questions, layouts, and new material requests. (Experienced labmembers
are especially welcome to help with suggestions and advice!)
Your SNF staff
Fwd: Stanford Univ-Vacuum Training Seminar-November 10th, 3-6pm
The RPL is hosting a vacuum training seminar on the afternoon of Nov. 10th, sponsored by Kurt Lesker. The seminar is free and open to anyone. The topics covered are listed in the enclosed attachment. It will be worth it for all users of vacuum systems to attend, and people who more involved in design, maintenance, and troubleshooting of vacuum systems will especially get a lot out of it.
Thanks,
James
----- Forwarded Message -----
From: "Shawn Jones" <shawnj@lesker.com>
To: ccchao1@stanford.edu
Sent: Thursday, October 30, 2008 7:12:39 AM GMT -08:00 US/Canada Pacific
Subject: Stanford Univ-Vacuum Training Seminar-November 10th, 3-6pm
Cheng-Chieh,
Kurt J Lesker Company will be conducting a free vacuum training seminar on November 10 th from 3-6pm at Stanford University, Building 300, Room 300. We are being hosted by the Fritz Prinz Group of the Rapid Prototyping Lab in Mechanical Engineering. I have attached two word documents with all the details of the vacuum training and the background of Mike McKeown, who is our chief vacuum scientist, and will be conducting the training. I would appreciate it if you could post this flyer in your area, email it to others in your group or otherwise share this information on to others who may be interested in attending. It is not necessary to RSVP to attend but I would appreciate it if any interested parties could let me know in advance as we will be having it catered with drinks/snacks.
Please visit our website at www.lesker.com
Shawn U. Jones
Regional Sales Manager
Kurt J. Lesker Co.
3983 First St.
Livermore, CA 94551-4909
209-401-6453 direct
800-245-1656 sales only
925-449-5227 fax
The Kurt J. Lesker Company was founded in 1954 as a manufacturers' representative for vacuum products in Pittsburgh PA, USA. Today, we are an international manufacturer and distributor of vacuum components and vacuum systems for research and industrial applications. We have three manufacturing locations, two in Pittsburgh and one in the UK; sales offices and warehouses across North America; KJLC offices in England and Hungary; and a network of agents around the world.
Lab Evacuation Sunday morning...
Some of you more industrious labmembers may have experienced this
morning's lab evacuation. At about 7:05 am, there was an evacuation for
a toxic gas alarm. Shortly thereafter, the Fire Department showed up.
(For those of you who were here, we appreciate you leaving the lab in a
timely manner.) The problem was a toxic gas sensor in one of the labs
in the other building (CISX), but since we share the same toxic gas
vaults, the response affects the entire building. Alarms were reset at
about 7:25 am. The building and lab are OK to re-occupy now.
If you were operating any equipment using any toxic gases (including H2)
during this time, please double-check your measurements. Please also
get in touch with a process staff member about adjusting your equipment
time, as appropriate.
Your SNF staff