MaN adhesion

My experience was that MaN does not like HMDS at all.

A plasma treatment just before spin was much more effective. O2 strip or Ar sputter. Equipment to use depends on if you are "golden" or CMOS clean.

jim

--- On Wed, 10/22/08, James Conway <jwc@snf.stanford.edu> wrote:

> From: James Conway <jwc@snf.stanford.edu>
> Subject: Re: Potential issue with YES oven
> To: "Arash Hazeghi" <ahazeghi@stanford.edu>
> Cc: labmembers@snf.stanford.edu, "Mahnaz Mansourpour" <mahnaz@snf.stanford.edu>
> Date: Wednesday, October 22, 2008, 10:24 AM
> Arash,
>
> You will likely need to perform a more thorough cleaning
> than just
> stripping in acetone as I don't think you are obtaining
> a clean surface
> to prime to.
>
> I would recommend Remover PG heated to between 40 and 60 C.
> with
> ultrasonic for 10 minutes, then a second bath of heated
> Remover PG for
> 5 - 10 minutes with ultrasonic,
> followed by 5 minutes in Acetone (No ultrasonic as it
> appears to often
> break the wafer in the U/S), followed by 5 minutes in
> Isopropanol with
> ultrasonic. Finally a perfect NS blow off and then direct
> into the YES
> Prime Oven.
>
> I used the prime oven yesterday and had normal results.
>
> Best,
>
> James Conway
>
>
> Arash Hazeghi wrote:
> >
> > Hi,
> >
> > I was trying to spin Ma-N 2043 (negative eBeam resist)
> on my wafers
> > (thermal SiO2), I used YES oven but the resist
> adhesion was very poor,
> > literally all the resist came off during spinning
> (like putting water
> > on a hydrophobic surface). The standard Ma-N 2043
> recipe recommends
> > HMDS step and I had successfully coated wafers with
> identical
> > processing in the past with Ma-N 2043. Last night, I
> tried three
> > times, each time striping the wafers in Acetone, and
> putting them in
> > YES oven prior to spinning but it didn't help.
> Nothing has changed in
> > the processing of my wafers so I tend to believe there
> was something
> > in the YES oven last night that caused poor adhesion.
> Has anyone else
> > experienced any similar issues? Is there a solution?
> >
> >
> >
> > Thanks,
> >
> > Arash
> >
> >
> >
> >
> >
> >
> >
> >
> ----------------------------------------------------------------------------------
> >
> > Arash Hazeghi
> >
> >
> >
> > PhD Candidate
> >
> > Stanford Center for Integrated Systems
> >
> > CIS-X 300, 420 Via Palou Mall,
> >
> > Stanford, CA 94305
> >
> >
> >
> > phone: +1-650-725-0418
> >
> > web: http://www.stanford.edu/~ahazeghi
> >
> >
> >