Thursday, January 31, 2008
Re: Shutdown p5000etch SNF 2008-01-31 04:02:14: wafer stuck in Ch C
Robot was stuck on the door. Straightened out the robot and unloaded user's wafer. Now intermittently faulting for an extension encoder error when running ch.C in auto. Does not fail when moving wafer in and out the chamber in manual. will continue to troubleshoot tomorrow. Cycled 30 wafers though Ch.B with no problems.
Subscribe to:
Post Comments (Atom)
No comments:
Post a Comment