Wednesday, January 30, 2008
Re: Problem p5000etch SNF 2008-01-28 18:42:35: Trouble with robot arm
Cleaned and reseated two connectors in the robot drive assembly. Changed system constant 107 (comb sensor test status) from 2 to 1. When it was set at 2, the system kept failing for "comb sensor not in correct location". Set at 1, error has not reoccured after 68 wafers cycled through Ch.C.
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