Saturday, January 26, 2008
Problem p5000etch SNF 2008-01-26 21:05:13: Wafer stuck inside
One of my wafers got stuck in the chamber C. There was an error stating "Chamber C slit valve did not open in maximum allowed time". After waiting a little, I tried the recovery procedure...but could not make much progress as I could not switch to manual mode. Fortunately, it is a dummy wafer.
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