Re: Pt and TiN etch qestions

Henry,

Definitely not P5000 because you have gold contaminated material. 

Pquest can solve your sio2 and TiN film stack. Scott lee has some good info on TiN. 

There is no RIE for Pt. you will need to sputter etch in mrc or the SNC ion mill. 

J

On Friday, May 4, 2012, Henry Hong-Yu Chen wrote:

Dear Lab Members,

My colleague and I are trying to etch through the following structures
by dryetch (P5000? PQUEST?). I wonder if anyone can share the
experience/recipe with us.  Both structure are on the top of very
thick SiO2.

Top/Bottom => 50nm SiO2 (STS) / 30nm Pt (innotec)
Top/Bottom => 50nm SiO2 (STS) / 80nm TiN (AJA)

Thanks,
Henry