Friday, May 11, 2012

imtec sapphire etching system for SNF small tool upgrade

Dear Labmembers, 

I am interested to know if there is interest in sapphire wet etch. Since sapphire wet etch requires hot temperatures (> 200C), it's currently not allowed to do this process in SNF. 

I would like to propose imtec sapphire etching system for SNF small tool upgrade if there are enough SNF users who are interested in this process. Since this system can be functional with a range of times and temperatures, it can also be used for other chemistries/processes that are compatible with quartz. Gold contaminated nitride wet etch is another example that I can think of beside sapphire wet etch.

Please let me know if you have any questions or want to express your interest in using this equipment. Thank you very much!

Sincerely,
Jae Hyung Lee

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