Pt and TiN etch qestions

Dear Lab Members,

My colleague and I are trying to etch through the following structures
by dryetch (P5000? PQUEST?). I wonder if anyone can share the
experience/recipe with us. Both structure are on the top of very
thick SiO2.

Top/Bottom => 50nm SiO2 (STS) / 30nm Pt (innotec)
Top/Bottom => 50nm SiO2 (STS) / 80nm TiN (AJA)

Thanks,
Henry