Wednesday, May 25, 2011

Re: Comment p5000etch SNF 2011-05-24 13:47:27: CASSETTE A NOT IN CORRECT POSITION WHEN DOOR IS OPENED

This is not a problem. Handler will automatically Home at the start of the recipe.
If the user need cassette to go to the Home position before the starting the recipe, go to the header WAFER > Control Handler > Home all robot axis

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