Re: Ion implantation company for heated non-standard ion implants

CORE Systems is the place to go.
1050 Kifer Road, Sunnyvale, CA 94086 (408) 328-1340
Ask for Chuck.
Good luck,
Betty

----- Original Message -----
From: "Jenny Hu" <jennyhu@stanford.edu>
To: "labmembers" <labmembers@snf.stanford.edu>
Sent: Sunday, February 13, 2011 3:43:00 AM
Subject: Ion implantation company for heated non-standard ion implants

Hi Labmembers,

Does anyone know of any reliable ion implantation companies that can do a heated (~200oC) implant of non-standard ions such as Si, S, and Te? I know Innovion and Coresystems are very good implant companies, however, for non-standard ions they add a $1000 set-up in addition to their $500/implant fee. In the past I have used Luxience for affordable implantation of these elements, but they do not offer heated implants.

Thank you very much in advance for your help.

Sincerely,
Jenny