We decide to leave the track down over the weekend so that on Monday, we can spend some more time setting up the track and doing some additional testing. The 220-3 coatings are showing an artifact pattern that may be related to exhaust. Adjusting for 220-3 may impact 220-7 and 3612 resists. We do not want to risk users having problems over the weekend and causing reworks. Sorry for the inconvenience.
The Litho Team
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