Litho up date

Hello all,

Happy holidays

During the shut down there were some work done on the litho area fan and we have increase of static pressure in the litho area.

In order to start the lab,  we have put all the adjustment to where it was before the exhaust upgrade  and tested most of the process during the shutdown.



Yes oven is up and has been tested.

Most metrology tools are up.

SVGcoat  recipe manager hard drive died, out for repair.  down.

SVGcoat 2 is up and has been tested for 3612 1um and 1.6 um.
we will test the rest of the programs today.

Please note that 220-3 has been moved to SVGcoat and 3617m moved back to  track 2.
we have upgraded all the documentation.

ASML: after the annual Pm Joey and Linda are doing the metrology for Pm, XPA marks and 3D.
I will notify you on some adjustment has been done to XPA in a different note.
The system should be up Wednesday morning.


Karlsuss2  goth the annual pm but did not get tested for BSA ( will do that on 1/5/11).
I tested the system and for 1 um 3612 ---.9 seconds exposure resolved 1.5 um.
I will test the system with 3612  1.6 um resist today.

Karlsuss1, will get its annual  pm on Wednesday 1/5
We have changed the lamp and I will test the system today.

Ev aligner is up and ready to be tested , I will do that today.

Headway is up and two new 4" chucks are purchased so enjoy them.

Laurell went to vendor for pm and should be back some time today.  Down

SVGdev UP

SVGdev2 UP

The spray coater did not come up after we powered the tool up, we will follow up with EVG.

The EV bonder is up and tested in manual mode but I have not ran a test yet.

All the ovens have been turned back on and the temp. has been confirmed.

All the hot plates will get tested some time today.


we will send out more info in a day or two.

Litho team