Fab start-up has been bumpy and we don't have all the equipment in
the metals-rtp-pecvd-metrology group up and running. I do want to
give you a quick update on where we stand Monday evening.
Innotec: In Qualification: The shielding has been changed and it is
pumping down within the expected time. Jeannie will be in early
Tuesday morning to run the coat with the expectation the system will
be available around noon on Tuesday.
Metalica: Down for most of the week: Jim fought with the lift
mechanism and ultimately decided he need to have a new channel
machined in to the lift tube and a new key made. The components are
at the machine shop under a priority request. We don't have a
commitment when the machining will be completed, but we are hoping to
have the system back towards the end of the week.
Gryphon: As far as I know the system is operating as it was before
the shutdown. The target replacement was one of the items which did
not happen over the holidays.
RTP's: All four systems are back under power and should be operating
as before the shutdown.
STS PECVD: In qualification, with no known problems and should be
available by noon on Tuesday.
Woollam: Down: The computer is not communicating with the control
electronics. I'm in touch with Woollam and we have found corrupted
IP addresses. I am hopeful the system will be UP on Tuesday.
As for the balance of the tools, I do not know of any problems and
they should be available when the fab opens in the morning. These
tools include the CMP, Prometrix, Nanospecs, AFM, Profilometers, ...
You will also notice, Jim installed the new SRD by the nitride wet bench.
Regards,
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