Sunday, October 24, 2010

Comment p5000etch SNF 2010-10-24 17:46:22: Cl2 MFC alarm in Ch. A

Alarmed for Cl2 MFC fault on 4 out of 9 wafers. Error occured in BT & ME - Cl2 flow = 10 sccm in BT and 40 sccm in ME. After celaring alarm wafers ran okay. Need to check Cl2 MFC.
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