Not sure if this is a problem with the resist not being fully baked out or if there's a problem with the P5000.
Resist: SPR-220 4um
Baked: 60min 110C oven + 140min 90C
Recipe: Ch. B Jim-Ox
Etch time: 580sec
Bias around -380V
He leakback < 1sccm
Power 500W with <1W reflected
Gas flows normal
Results:
Resist starts to burn around the edges after 1min. After 580sec etch, the outer 10mm of the wafer edges have burnt resist.
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