The robot blade hitting the i/o door during load/unload
sequence, i/o door intermittenly does not open all the
way down. This was the same problem that I encountered
few months back on the same chamber (c), the i/o door
actuator valve assembly is bad . I temporary got the i/o door
working for now by cycling the door open and close and adjusting
the air needle valve. I will talk to John Shott and recommend
upgrading the i/o door valve assembly to a ZA valve assembly.
Use chamber C with caution
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I spoke to our P5000 expert about your problem in April with the slit valve door and Chamber C. Hopefully I explained it to him correctly as I didn't have a printout of the problem while discussing. Here is his feedback:
If the extension encoder errors are happening only on chamber 'C', it probably has nothing to due with the robot unless they are getting rotation errors. The problem most likely is the SV. The door style SV's are prone to closing prematurely when the actuator starts to go bad. The SV will only close enough to make the door catch on the bottom of the robot arm and cause an extension encoder err of about 1370 counts. The way to confirm this is to adjust the SV open sensor located on the bottom side of the actuator so that it sees open only when the door is completely open. This may require that the sensor be flipped upside down and hang a bit off the bottom of the actuator. If the actuator is the issue they will start getting SV not open within timeout or position unknown errors. What they will need to do is either replace or rebuild the actuator. Another issue that causes this is that the actuator shaft starts to unscrew from the assy and the gap that forms wont let the door open all the way even though the sensor says open. The ways to check this is to look with a mirror at the bottom of the robot arm with it over the SV and see if there is clearance. Or, remove the SV assy and check to see if it has come loose.
I hope this fixes your issues.
Best regards,
David
David Lee
G-Fab Inc.
Colorado Springs, CO 80906
719-229-6066 (phone)
775-262-0409 (fax)
support@global-fab.com
www.global-fab.com
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