Problem p5000etch SNF 2009-04-06 00:31:00: Mishandled Wafers - Encoder Error 177

When retrieving wafer from chamber c, recieved encoder error 177. It seems that the tool did not realize it picked up the wafer. Was able to retrieve the wafers using recovery procedure. But, it did not fully place it in the load cassette (half blocking load lock door). Used tweezers to pull wafer into casette. Tool still believes there is a wafere in chamber c.