Saturday, March 15, 2008

Shutdown p5000etch SNF 2008-03-15 00:12:21: "Chamber A wafer lifter cannot reach process position within timeout"

Same problem as before, and before, and before. Using a P5000 lab dummy, running standard recipe CH.A METAL.
Wafer is in chamber. All other chambers are offline. Machine unusable.
Could we please call AMAT service again, as they seem to be the only solution to getting the machine operational?

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