Hi all,
Does anyone know the bake conditions for AZ3612 before 20keV 4e15 ion-implantation?
I was using 115C 30min (on hot plate) last night but found wrinkles on my photoresist.
Any suggestion is appreciated. Thanks!
Sincerely yours,
Liangliang
-------------------------
Liangliang Zhang
Ph. D candidate,
Electrical Engineering,
Stanford University
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