I posted this message last night and for some reason it was removed and the tool green lighted. Has it been fixed? There is no history of anyone using the tool after me so I assume it has not. Can someone please let me know what the status is. I have a critical batch of wafers and a tight timeline. Thanks!
After running two test wafers in Chamber B, Jim Ox for 120sec, both returned with a small chip in the upper left corner, where one of the clamp fingers is applied.
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