Wednesday, December 1, 2010

contact exposure of 3612 on quartz

Hi Labmembers,

I am wondering if anybody has experience with using contact mask exposure for standard 1um 3612 resist coated on quartz substrates? The resist came out very clear on the quartz, so I am assuming the exposure time may be significantly different than the standard 1.2 s that I use with EVAligner. Any experience in this area would be appreciated.

Thank you,
Neil Dasgupta

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