Reminder: Last Venture Clinic, Today, Thursday, Dec. 16, 4 pm Allen 101

Dear Labmembers:

Shahin Farschi of Lux Capital will be hosting what will be the

last Venture Clinic of the year this Thursday, Dec. 16 at 4 pm in Allen 101.

In addition, we will have a special guest, Gavin McCraley, from Wilson Sonsini

Goodrich & Rosati in Palo Alto, a law firm specializing startups.

Learn about the current conditions in the venture world or discuss

your startup ideas with a couple of experienced venturists.

Shahin may also be contacted directly:

Shahin Farshchi, Ph.D.

Senior Associate

Lux Capital Management, LLC

C: 925.323.2784

http://www.luxcapital.com

--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang@stanford.edu
http://snf.stanford.edu

Toxic Gas alarm testing today and tomorrow ....

SNF Lab Members and Allen Building Occupants:

Today and tomorrow the SNF staff in conjunction with an independent
testing company and Santa Clara county officials will be conducting
tests of each of the toxic gas detectors in our facility. Part of this
testing checks to make sure that appropriate blue toxic gas alarms and
fire alarms ring. As a result there will likely be at least a couple
.... and conceivably many ... times that the blue toxic gas alarms
and/or fire alarms may ring today and tomorrow.

We know that these are loud and hard to ignore. However, these, can be
safely ignored ... unless you quickly hear announcements that there is a
real emergency. Note: if there is a real smoke alarm, fire, earthquake,
or other emergency situation, the alarms will ring normally and the fire
department will be called, In that case it is important to make the SNF
staff aware of any real alarm situations such as a fire or medical
emergency.

While we apologize for the disruption that this testing causes, but this
is an important element of ensuring all of our safety in terms of proper
detection and notification of detected toxic gases during the entire year.

Thanks,

John

Reminder: Annual lab shutdown start 7 am Thursday

Dear labmembers --

Just a reminder of the annual lab shutdown, starting Thursday, Dec. 16
at 7 am. Please be aware of the lab and CAD room cleanups underway. The
lab reopens on Tuesday, Jan. 4 at 7 am.

Happy holiday!

You SNF staff

Fwd: [foundryoutreach] The Molecular Foundry Call for Proposals

-------- Original Message --------

Subject:	[foundryoutreach] The Molecular Foundry Call for Proposals
Date:	Tue, 14 Dec 2010 10:20:02 -0800
From:	Molecular Foundry <lmstclaire@lbl.gov>
Reply-To:	foundry@lbl.gov
To:	foundryoutreach@lbl.gov, mf-people@lbl.gov

Call for User Proposals - The Molecular Foundry

Call for Proposals Begins - Wednesday, December 15, 2010

Submission Deadline - Friday, January 14, 2011

Projected Award Date - Tuesday, April 4, 2011

Dear Colleagues,

The Molecular Foundry at Lawrence Berkeley National Laboratory (LBNL), a Department of Energy (DOE) national nanoscience user facility, is currently accepting requests for user access to its instruments, capabilities and skilled technical staff from scientists and engineers who are seeking to enhance their own research projects. Requests from potential users, in the form of web-based standard proposals, must be received not later than January 14, 2011 to be considered in our current semiannual call cycle.

The mission of the LBNL Molecular Foundry is to provide researchers from academic, government and industrial laboratories from around the world access to instruments, materials, technical expertise and training in nanoscience. Access to the Foundry is free of charge for research that is in the public domain and intended for open publication. Users wishing to generate as well as maintain confidential information and data will pay a full-cost-recovery rate, but also have greater latitude regarding collaboratively generated intellectual property.

The Molecular Foundry hosts six Facilities focusing on the multidisciplinary development and understanding of "soft" (biological and polymeric) and "hard" (inorganic and microfabricated) nanostructured building blocks and their integration into complex functional assemblies. These research facilities serve as a particularly valuable resource for users pursuing multidisciplinary research in nanoscience (e.g., physicists interested in learning biological techniques, biologists seeking nanofabrication expertise, experimentalists pursing theoretical studies). All projects that may benefit from Foundry capabilities are welcome, particularly those which relate to our four research themes and reflect areas of expertise of the Molecular Foundry staff. The Foundry strongly encourages project submissions that take advantage of our other LBNL user facilities, including the Advanced Light Source, Energy Sciences Network, Joint Genome Institute, the National Energy Research Scientific Center, and the National Center for Electron Microscopy. The Foundry also maintains agreements with affiliated laboratories that can be requested within your web-based proposal submission.

Prospective users are invited and strongly encouraged to contact Molecular Foundry staff in the respective theme areas to discuss proposal ideas and to learn more about special capabilities of particular interest (visit the "Our Staff" section at the Foundry web site). We encourage discussion of your proposal's central ideas to ensure the Foundry has appropriate facilities, equipment and staff to perform your requested research.

Decisions reached in this round of proposal submissions will be announced approximately ten weeks after submission deadline; for this call we anticipate a notification date of April 4, 2011. All approved projects will receive user access and work may begin as soon as scheduled after this notification, having a signed user agreement in place between institutions and completion of EH&S requirements.

For further information, please visit:

The Molecular Foundry Home Page
http://foundry.lbl.gov

The User Program Description
http://foundry.lbl.gov/scientific/index.html

The User Proposal Process
http://foundry.lbl.gov/scientific/Proposal_Process.html

Molecular Foundry Staff Scientists
http://foundry.lbl.gov/about/staff.html

LBNL User Facilities and Affiliated Laboratories
http://foundry.lbl.gov/six/affiliated.html

We look forward to receiving your new proposal. Should you have any questions regarding this process, please contact the User Program Office by e-mail at foundry@lbl.gov or by telephone at 510-486-4574.

--   The Molecular Foundry http://foundry.lbl.gov foundry@lbl.gov ph: 510.486.7493  

Last 2010 Venture Clinic, Thursday, Dec. 16, 4 pm, Allen 101

Dear Labmembers:

Shahin Farschi of Lux Capital will be hosting what will be the

last Venture Clinic of the year this Thursday, Dec. 16 at 4 pm in Allen 101.

In addition, we will have a special guest, Gavin McCraley, from Wilson Sonsini

Goodrich & Rosati in Palo Alto, a law firm specializing startups.

Learn about the current conditions in the venture world or discuss

your startup ideas with a couple of experienced venturists.

Shahin may also be contacted directly:

Shahin Farshchi, Ph.D.

Senior Associate

Lux Capital Management, LLC

C: 925.323.2784

http://www.luxcapital.com

[Reminder] Special Seminar - Prof. Ivan Kaminow (UC Berkeley), Tuesday Dec.14, 4:15 PM, Nano 232

Special Seminar Presented by the Stanford Optical Society

Lightwave Modulators: Early Research at Bell Labs

Prof. Ivan P. Kaminow

EECS, UC Berkeley

 

Tuesday, December 14, 4:15 PM, Nano Center 232

Refreshments at 4PM

 

Ted Maiman's announcement of the ruby laser in May 1960 created great excitement worldwide, and particularly at Bell Labs. I was in the Microwave Systems Research Lab, soon to become the Lightwave Systems Research Lab, in Holmdel, NJ. Many of my colleagues decided to pursue laser research. Based on my experience with microwave systems, I decided to explore broadband light modulators that would be key for any telecom system. In my talk, I plan to touch on some of the highlights of a 15-year period of research on electrooptic modulators in the Bell Labs ambience. I include a 9 GHz travelling wave modulator, studies of electrooptic materials and photonic integrated circuits.

 

About the speaker

Ivan Kaminow retired from Bell Labs in 1996 after a 42-year career (1954-1996), mostly in lightwave research. At Bell Labs, he did seminal studies on electrooptic modulators and materials, Raman scattering in ferroelectrics, integrated optics (including titanium-diffused lithium niobate modulators), semiconductor lasers (including the DBR laser, ridge waveguide InGaAsP laser and multi-frequency laser), birefringent optical fibers, and WDM lightwave networks. Later, as Head of the Photonic Networks and Components Research Department, he led research on WDM components (including the erbium-doped fiber amplifier, waveguide grating router and the fiber Fabry-Perot resonator), and on WDM local and wide area networks. Earlier (1952-1954), he did research on microwave antenna arrays at Hughes Aircraft Company.

After retiring from Bell Labs, he served as IEEE Congressional Fellow on the staffs of the House Science Committee and the Congressional Research Service (Science Policy Research Division) in the Library of Congress. From 1997 to 1999, he returned to Lucent Bell Labs as a part-time Consultant. He also established Kaminow Lightwave Technology to provide consulting services to various technology companies, and to patent and litigation law firms. In 1999 he served as Senior Science Advisor to the Optical Society of America in Washington. He also served on a number of professional committees. He received degrees from Union College (BSEE), UCLA (MSE) and Harvard (AM, Ph.D.). He was a Hughes Fellow at UCLA and a Bell Labs Fellow at Harvard.

He has been Visiting Professor at Princeton, Berkeley, Columbia, the University of Tokyo, and Kwangju University (Korea). Currently, he is Adjunct Professor in EECS at University of California, Berkeley, where he has been teaching since 2004 (ee290F. Advanced Topics in Photonics [spring 2004]; ee233. Lightwave Systems [spring 2006]; seminar on Plasmonics [spring, fall 2007] and seminar on Photonics and Plasmonics [spring, fall 2008; spring, fall 2009; spring, fall 2010]).

He has published over 240 papers, received 47 patents, and has written or co-edited 5 books, the most recent being "Optical Fiber Telecommunications V A&B," co-edited with Tingye Li and Alan Willner, published in March 2008. Kaminow is a Life Fellow of IEEE, and Fellow of APS and OSA. He is the recipient of the Bell Labs Distinguished Member of Technical Staff Award, IEEE Quantum Electronics Award, OSA Charles Townes Award, IEEE/LEOS/OSA John Tyndall Award, IEEE Third Millennium Medal, Union College Alumni Gold Medal and IEEE Photonics Award. He is a member of the National Academy of Engineering, a Diplomate of the American Board of Laser Surgery, and a Fellow of the New York Academy of Medicine.

---

Stanford Optical Society: http://photons.stanford.edu

PhD Defense: Shen Ren, Monday, Dec 13, 2010

Stanford University PhD Oral Defense – Department of Electrical Engineering

 

Ph.D. Candidate: Shen Ren

Advisor: Prof. David. A. B. Miller

Date: Monday, Dec 13^th, 2010

Time: 10am (Refreshments start at 9:45am)

Location: CISX Auditorium (101X)

Title: Ge/SiGe Quantum Well Waveguide Modulator for Optical Interconnect Systems

 

Abstract

Thanks to the development of silicon VLSI technology over the past several decades, we can now integrate far more transistors onto a single chip than ever before. However, this also imposes more stringent requirements, in terms of bandwidth, density, and power consumption, on the interconnect systems that link transistors. The interconnect system is currently one of the major hurdles for the further advancement of the electronic technology. Optical interconnect is considered a promising solution to overcome the interconnect bottleneck.

 

In this presentation, I will first briefly introduce the optical interconnect system. Then a special type of device in the optical interconnect system, the optical waveguide modulator that is based on Ge/SiGe quantum well (QW) structures, will be presented. Such QW structures can be grown monolithically on silicon substrates in a fully CMOS compatible fashion. For the first time, we demonstrated the selective epitaxial growth of these structures on patterned substrates. The selective epitaxy exhibits minimal pattern sensitivity under optimized growth conditions. Compared to its counterparts through bulk epitaxy, the p-i-n diodes from selective epitaxy demonstrate very low reverse leakage current and high reverse breakdown voltage. Strong quantum-confined Stark effect (QCSE) is, for the first time, demonstrated in this material system in the telecommunication C-band at room temperature. Then I will present our approach of integrating the Ge/SiGe QW active optical modulators into the silicon-on-insulator (SOI) waveguide platform through selective epitaxial growth. We proposed, analyzed, and experimentally demonstrated a novel approach to realize the butt coupling between SOI waveguide and Ge QW waveguide modulator using a thin dielectric spacer. 3.2dB modulation contrast ratio is achieved with merely 1V dynamic swing. We also show high speed modulation up to 3.5GHz, which is currently limited by our testing capability.

--
Best wishes,

Shen Ren

Department of Electrical Engineering
Stanford University


The optimist thinks this is the best of all possible worlds. The pessimist fears it is true.
- Robert Oppenheimer

Asking for some information

Hello, labmembers,

This is Seongjae at Prof. Harris group.
If anyone has answers for questions below, please let me know.
Answers for multiple questions are much better of course
but even if you have an answer for one question, that will be fine too.

The intend is to use Cr as the hard mask to etch multiple layers
and remove it by CR-14 minimizing the exposure of the lower layers
to CR-14 since the layers in my concern turned out to be also etched
by CR-14 significantly by SEM inspection.

1. Cr etch rate in drytek 4 at a usual oxide etch recipe.

2. Cr etch rate in pquest at a usual GaAs etch recipe.

3. Cr etch rate by CR-14 (wet etchant for Cr) as accurately as possible.

Thank you for your help in advance.

- Sincerely, Seongjae.

Spin-on glass?

Anyone has Honeywell 512B (or similar) spin-on glass? Only a few
milliliters is needed.

Thanks,
Wenshan Cai, MSE, Stanford

Re: Problem p5000etch SNF 2010-12-09 22:48:18: Chamber C offline

Placed Ch.C online.
User's can put the chamber online by selecting : SERVICE header > VACUUM SERVICE > then click on the blue lettering of the chamber that needs to be placed online > select ONLINE.

Problem p5000etch SNF 2010-12-09 22:48:18: Chamber C offline

I accidentally put the Poly Etch recipe in B slot and selected C ONLY, so wafer was just sitting in the elevator in there. I put poly etch into slot C and hit RUN and nothing happened, and then realized it was in Manual mode, so I changed that to automatic and hit RUN, and it turned green, but it didn't seem like anything was happening, so I hit STOP (was it during pumpdown?), and recovered my wafer using the instructions. But now chamber C cannot do further processing. Sad.

Reminder: Allen Building Holiday Party is Today!!!

The annual Allen/X Building holiday party is in just one hour!

Please come to the annual Allen Building holiday party. This will be
next Thursday, at 2 pm, just outside the yellow window area of the lab.
Enjoy snacks, traditional games ("wafer toss"), create your own silicon wafer ornament, and just
spend some time reconnecting before heading off for the holidays. Stop
on by for an afternoon break (generously sponsored by the CIS Affiliates.)

Your party committee

--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang@stanford.edu
http://snf.stanford.edu

EE412 Final Presentations - Today at 4, in the AllenX Auditorium

Dear Labmembers --  Just a reminder of the presentations by members of the EE412 Advanced Nanofab  Processing class.  This is a team-project based course with the aim to  develop, characterize, and document processes of value to the SNF lab community.   Here is the schedule:  

4:00-4:15            Pizza

4:15-4:20            Introduction by the instructors (Profs. Howe and Solgaard)

4:20-4:35            STSEtch2 Profile Characterization
                           Undercut and Notching Elimination for Silicon Etching in STSetch2
                           Lele Wang, Dong Liang and Yu-Shuen Wang

 
4:40-4:55            STSEtch2: High Aspect Ratio Silicon Etching
                           High Aspect Ratio Si Etching in STS2
                           Jaewoong Jeong

 
5:00-5:15            Deep Trench Spray Coating
                           Process for spray coating and ASML patterning in deep trenches
                           Karthik Vijayraghaven

 
5:20-5:35            ALD Nitride
                           Developing ALD Nitride on the Savannah
                           Shingo Yoneoka, Yi-Hsuan Lin, Scott Lee, Chu-En Chang

 
5:40-5:55            ALD Nanolaminates
                           ALD Oxide Nanolaminates
                           Yi Wu, Shimeng Yu, Shuang Li

 
6:00-6:20            ALD Oxides and Germanium Passivation
                           High-k Film on Ge Characterization and Atomic Layer Removal (ALR) of Ge
                           Ze Yuan, Jason Lin, Woo Shik Jung, Ju Hyung Nam

--  Mary X. Tang, Ph.D. Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA  94305 (650)723-9980 mtang@stanford.edu http://snf.stanford.edu 

Special Seminar - Prof. Ivan Kaminow (UC Berkeley), Tuesday Dec. 14, 4:15 PM, Nano 232

Special Seminar Presented by the Stanford Optical Society

Lightwave Modulators: Early Research at Bell Labs

Prof. Ivan P. Kaminow

EECS, UC Berkeley

 

Tuesday, December 14, 4:15 PM, Nano Center 232

Refreshments at 4PM

 

Ted Maiman's announcement of the ruby laser in May 1960 created great excitement worldwide, and particularly at Bell Labs. I was in the Microwave Systems Research Lab, soon to become the Lightwave Systems Research Lab, in Holmdel, NJ. Many of my colleagues decided to pursue laser research. Based on my experience with microwave systems, I decided to explore broadband light modulators that would be key for any telecom system. In my talk, I plan to touch on some of the highlights of a 15-year period of research on electrooptic modulators in the Bell Labs ambience. I include a 9 GHz travelling wave modulator, studies of electrooptic materials and photonic integrated circuits.

 

About the speaker

Ivan Kaminow retired from Bell Labs in 1996 after a 42-year career (1954-1996), mostly in lightwave research. At Bell Labs, he did seminal studies on electrooptic modulators and materials, Raman scattering in ferroelectrics, integrated optics (including titanium-diffused lithium niobate modulators), semiconductor lasers (including the DBR laser, ridge waveguide InGaAsP laser and multi-frequency laser), birefringent optical fibers, and WDM lightwave networks. Later, as Head of the Photonic Networks and Components Research Department, he led research on WDM components (including the erbium-doped fiber amplifier, waveguide grating router and the fiber Fabry-Perot resonator), and on WDM local and wide area networks. Earlier (1952-1954), he did research on microwave antenna arrays at Hughes Aircraft Company.

After retiring from Bell Labs, he served as IEEE Congressional Fellow on the staffs of the House Science Committee and the Congressional Research Service (Science Policy Research Division) in the Library of Congress. From 1997 to 1999, he returned to Lucent Bell Labs as a part-time Consultant. He also established Kaminow Lightwave Technology to provide consulting services to various technology companies, and to patent and litigation law firms. In 1999 he served as Senior Science Advisor to the Optical Society of America in Washington. He also served on a number of professional committees. He received degrees from Union College (BSEE), UCLA (MSE) and Harvard (AM, Ph.D.). He was a Hughes Fellow at UCLA and a Bell Labs Fellow at Harvard.

He has been Visiting Professor at Princeton, Berkeley, Columbia, the University of Tokyo, and Kwangju University (Korea). Currently, he is Adjunct Professor in EECS at University of California, Berkeley, where he has been teaching since 2004 (ee290F. Advanced Topics in Photonics [spring 2004]; ee233. Lightwave Systems [spring 2006]; seminar on Plasmonics [spring, fall 2007] and seminar on Photonics and Plasmonics [spring, fall 2008; spring, fall 2009; spring, fall 2010]).

He has published over 240 papers, received 47 patents, and has written or co-edited 5 books, the most recent being "Optical Fiber Telecommunications V A&B," co-edited with Tingye Li and Alan Willner, published in March 2008. Kaminow is a Life Fellow of IEEE, and Fellow of APS and OSA. He is the recipient of the Bell Labs Distinguished Member of Technical Staff Award, IEEE Quantum Electronics Award, OSA Charles Townes Award, IEEE/LEOS/OSA John Tyndall Award, IEEE Third Millennium Medal, Union College Alumni Gold Medal and IEEE Photonics Award. He is a member of the National Academy of Engineering, a Diplomate of the American Board of Laser Surgery, and a Fellow of the New York Academy of Medicine.