Wednesday, August 5, 2009
Shutdown p5000etch SNF 2009-08-05 01:53:05: wafer lost
It thinks it has the wafer in the elevator, but I didn't see it there. I've also asked it to find it in all chambers, but it can't find anything. Please find the wafer and put it in the box. Also, please let me know the location where the wafer is found. Thanks!
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