Wednesday, August 5, 2009

Re: Shutdown p5000etch SNF 2009-08-05 01:53:05: wafer lost

Recoved wafer from Ch.C and placed in the user's wafer container. It looks like it completed the etch and was mis-handled during the unload. Adjusted the wafer placement in the chamber and cycled 12 wafers with no problems.

No comments: