Chamber A lift sensor is operational again after cleaning the chamber interconnect connector. Ran 6 wafers with no problem.
Chamber B magnet contactor is also operational. Vendor cleaned some contacts. However the machine alarms for "low magnet current " because the reading on one of the magnets power cable is indicating low current flow. Might be more bad connections but the system ran OK for recipes that have a magnetic field require of less than 60 gauss. Vendor will continue to work on this problem.
Will test system thoroughly on Monday before releasing ??
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