Tuesday, February 5, 2013

[p5000etch-pcs] Comment p5000etch SNF 2013-02-05 15:38:30: chipped wafer in Ch. B

Xin and I etched a wafer for 240sec, and when the weafer came out , it was chipped in 3-4 places
Warning: the small pieces might still be in the chamber B
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