Tuesday, August 21, 2012

Solution for Slow Etch Pit Density Studies in Ge

Hi All,

I'm looking for an etchant for looking at etch pit density studies for Germanium (001) epi (etching pits corresponding to threading dislocations). There are a few recipes out there, but I believe they use some non-standard and non-stocked chemicals in SNF. Does  anyone have a recipe (and the chemicals) that is verified to work for this?

Thanks,

Robert Chen

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