Friday, February 24, 2012

Comment p5000etch SNF 2012-02-24 17:48:56: CH.B OXIDE Etch rates

Thermal Ox = 3530A/min
3612 PR = 1800A/min
Single crystal Si = 750A/min
Polysilicon = 1010A/min
Sel Ox : PR = 2.0 : 1
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