Problem p5000etch SNF 2011-12-06 19:53:24: Ch.C wafer return problem

Following a long etch (>30min), tool sat in state of waiting for blade in for ~5-10min. after trying to get it into manual mode, the system would ignore all commands but slowly go through the steps to return the wafer (one step every 5min or so). it did eventually return the wafer, but the entire process took about 20-30min.