Re: silicon through etch using STSetch

hey ben,

i just did this last week with my REU.  we do not have another wafer scheduled for through wafer etch, but i'm going to be in the fab heavily starting next week and can help you if a better offer for you does not come along.  are you trained on the stsetch already?  if so we can work with your test wafer or we can practice/shadow with the pattern kelly made for her project.

j

On Fri, Jul 1, 2011 at 12:09 PM, Benjamin Tee <benjamin.tee@stanford.edu> wrote:

Dear Experienced Labmembers,

Happy July 4th!

I would like to etch through standard silicon wafers of 500um thick, and was hoping to learn from someone who is doing such a process on a regular basis to shadow. If anyone is willing to allow me to shadow, please drop me an email. 

Many thanks!

Ben

--
Benjamin Tee
Ph.D Candidate, Electrical Engineering
Stanford University

Cell: 650-704-4300
M.S (EE) Stanford University '07
B.S.E (EE) University of Michigan - Ann Arbor '06

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