Friday, June 11, 2010

Problem p5000etch SNF 2010-06-11 15:14:08: Cl2 MFC unstable in Ch. A

Cl2 MFC was fluctuating quite a bit. Process stopped on 4 wafers and needed to be restarted. Fluctation noticed for 30 sccm set point was: 26-38 sccm.
Posted by at

No comments:

Post a Comment

Subscribe to: Post Comments (Atom)