Re-ran the same conditions as earlier this week- CH B OXIDE, 120 secs, 5 wafers, LTO masked with PR.
Here are the DC bias ranges and averages for each wafer;
#1 -508 to -523 avr = -517V
#2 -506 to -530 avr = -515V
#3 -511to -539 avr = -519V
#4 -508 to -531 avr = -521V
#5 -506to -533 avr =-519V
Match set point in the header was at 3.8V
Elmer ran 8 wafers with CH B JIM-OX for 450 secs, bare wafers with the same result. Match set point set to 2.0V.
Ok to use, but keep an eye on RF numbers.
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