Comment p5000etch SNF 2010-01-22 14:31:36: Update Ch.B

Cycled 24 wafers using the Jim Ox recipe with a 30 sec, 25 W, Argon plasma Declamp step and had no problems. A user ran 4 wafers using the same recipe (15 sec, 50 W) Declamp step. I will continue to test the chamber handling but if you need to use the chamber please contact a staff member and we can assist you in running your wafers. This will also help us collect information on which types of wafers and which processes tend to have handling problems.