Ch.A is OK to use but etch rate might have changed. If you are not using the end point in your recipe, please run an etch rate test before committing your actual devices.
We temporarily bypassed the flow sensor in order to make the chamber functional. There is actual flow through the cooling lines but it is just slightly just below the fllow threshold. The plan is to change the heat exchanger pump on Wed.
Subscribe to:
Post Comments (Atom)
No comments:
Post a Comment