Hello,
Does anyone have experience with phosphorus-containing spin-on dopants? I want to make an ohmic contact to n-type Si (P-doped, ~10^15 cm^-3), so I would like to bring up my doping levels to >10ˆ19 cm^-3 under my contacts. I would greatly appreciate any advice you can give me regarding suppliers and/or recipes that have produced good results at SNF.
Cheers!
– Aaron
--
Dr. Aaron Hryciw
Postdoctoral Scholar
Geballe Laboratory for Advanced Materials
Stanford University
476 Lomita Mall (04-490)
McCullough Building, Rm. 325
Stanford, CA 94305-4045
Tel.: (650) 723-5840
Fax.: (650) 736-1984
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