Thursday, January 29, 2009

Re: Problem p5000etch SNF 2009-01-29 01:01:00: Chamber C OFFLINE

Placed chamber C back online.
The users now has the access level to be able to put a chamber back online.
- Click on the SERVICE pull-down menu
- Click on VACUUM SERVICE
- Go to the chamber that you wish to put online and click on
the PUT ONLINE FOR PROCESS box

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