Saturday, May 3, 2008
Shutdown p5000etch SNF 2008-05-03 23:35:10: Wafer was dropped in the load chamber
There was a alarm during the unload that the wafer did not drop on the blade. Tried the recovery from STOP process and the blade dropped the wafer while trying to unload it. My device wafer is underneath the back of the transfer arm in the load lock right beside Chamber A door.
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