All,
We are tentatively scheduled for the County to come in Monday afternoon
(1pm-5pm) and test our Toxic Gas Monitoring changes associated with the
new etcher installation. The county will want to see live gas
challenges, which will lead to shutdown of our hazardous gases. This
will be very dissruptive since it will effect the gas supplies all the
etcher, epi, LPVCD, PECVD, etc. Once I receive confirmation as to the
time of the visit, I will make blocking reservations on all the tools
which will be effected.
While I know how disruptive this is, it is also very good news for those
waiting for the new etcher to come on line. We must pass this
inspection before we can turn on the process gases. Once we can turn on
the process gases, the process engineers can come in and do the final
start-up and qualification on the four new etchers.
Regards,
The SNF Staff
Tuesday, July 31, 2012
Saturday, July 28, 2012
a request
hello labmembers,
i would like to have your help in locating someone or something.
sometime today (saturday july 28th) between 2pm and 8pm someone stole two 4" single wafer trays of mine from the table by the fiji. they had my name and the name of hongyuan (a student working with me) on them. they were empty waiting for the wafers being processed to fill them up when complete. now a 4" single wafer tray isn't that expensive or a big deal. stealing is. so:
1) if you took it, put it back and never ever treat your fellow labmembers with such disrespect again.
2) if you know who took it, please ask them more nicely to return it and encourage them to start acting like a grownup. or let me know and i'll utilize this teaching moment to hopefully improve a misguided mind in our lab.
3) if you know nothing of this incident, but are concerned about the community and continued and improving excellence of our lab, do not let shallow poor behavior exist should you run across anything similar in your time in this lab.
i mildly desire to know who did this and wasted my time,
BUT
i strongly desire such a betrayal of the trust within the SNF community never to be perpetrated again.
and if you need a 4" single wafer carrier, just ask me like the responsible adult i assumed you were.
j
i would like to have your help in locating someone or something.
sometime today (saturday july 28th) between 2pm and 8pm someone stole two 4" single wafer trays of mine from the table by the fiji. they had my name and the name of hongyuan (a student working with me) on them. they were empty waiting for the wafers being processed to fill them up when complete. now a 4" single wafer tray isn't that expensive or a big deal. stealing is. so:
1) if you took it, put it back and never ever treat your fellow labmembers with such disrespect again.
2) if you know who took it, please ask them more nicely to return it and encourage them to start acting like a grownup. or let me know and i'll utilize this teaching moment to hopefully improve a misguided mind in our lab.
3) if you know nothing of this incident, but are concerned about the community and continued and improving excellence of our lab, do not let shallow poor behavior exist should you run across anything similar in your time in this lab.
i mildly desire to know who did this and wasted my time,
BUT
i strongly desire such a betrayal of the trust within the SNF community never to be perpetrated again.
and if you need a 4" single wafer carrier, just ask me like the responsible adult i assumed you were.
j
Wednesday, July 25, 2012
PM alignment marks
Hi Labmembers and ASML users,
I am creating a mask for ASML using PM alignment marks. Does anyone know if it matters when the PM mark is close to the design patterns? I will have a design about 200um away from the PM marks. If you can comment on the feasibility and potential issues, that would be really appreciated.
Thanks a lot!
Hai
I am creating a mask for ASML using PM alignment marks. Does anyone know if it matters when the PM mark is close to the design patterns? I will have a design about 200um away from the PM marks. If you can comment on the feasibility and potential issues, that would be really appreciated.
Thanks a lot!
Hai
wafer bonding experience
Hey everyone,
I was wondering if anyone had bonded PECVD oxide to either another oxide, glass, quartz (or any other insulator).
Any help would be appreciated,
Max
I was wondering if anyone had bonded PECVD oxide to either another oxide, glass, quartz (or any other insulator).
Any help would be appreciated,
Max
Process Clinic Thursday at 10:30 (Note time change!)
Dear labmembers --
Just a reminder of the Process Clinic on Thursday, Jul. 26. It will
start at 10:30 am and will be held in the cube area near Maureen's
office (and right next to Jim Kruger's desk, giving us a better chance
of picking his brain.) Please note the time change to 10:30. Bring
your process flows, device sketches, mask layouts, photos of your
devices, and data. Staff will be on hand (and maybe Jim too?) to
brainstorm answers to your questions.
Your SNF staff
Just a reminder of the Process Clinic on Thursday, Jul. 26. It will
start at 10:30 am and will be held in the cube area near Maureen's
office (and right next to Jim Kruger's desk, giving us a better chance
of picking his brain.) Please note the time change to 10:30. Bring
your process flows, device sketches, mask layouts, photos of your
devices, and data. Staff will be on hand (and maybe Jim too?) to
brainstorm answers to your questions.
Your SNF staff
Tuesday, July 24, 2012
Lab now open
Hi Members,
We had a POCl alarm and Silane alarm go off in separate two exhausted cabinets at 2:03pm today above the Tylan LPCVD furnaces. The sensors in the breathing zone did not detect anything.
We waited until the two cabinets were out of alarm status before letting users back into the lab.
The lab was closed from 2:02 until 3:10.
The Tylans 5, 6, 7, 8, 9, 10, 11, will all be shutdown while we investigate the cause of the alarms.
We will send another update once we have more information.
-m
--
maurice@stanford.edu
Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA 94305
P. (650)725-3660
F. (650)725.6278
We had a POCl alarm and Silane alarm go off in separate two exhausted cabinets at 2:03pm today above the Tylan LPCVD furnaces. The sensors in the breathing zone did not detect anything.
We waited until the two cabinets were out of alarm status before letting users back into the lab.
The lab was closed from 2:02 until 3:10.
The Tylans 5, 6, 7, 8, 9, 10, 11, will all be shutdown while we investigate the cause of the alarms.
We will send another update once we have more information.
-m
--
maurice@stanford.edu
Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA 94305
P. (650)725-3660
F. (650)725.6278
ITO deposition
Labmembers,
Zach
--
Zach Beiley
Materials Science and Engineering
Stanford University
476 Lomita Mall
McCullough 201
Stanford, CA 94305
Today's lab evacuation
Hi Members,
We had a POCl alarm and Silane alarm go off in separate two exhausted cabinets at ~2:05pm today above the Tylan LPCVD furnaces. The sensors in the breathing zone did not detect anything.
We are waiting for the levels in those two cabinets to return to normally before letting users re-enter the lab.
We expect to let everyone back in at 3:00pm.
The Tylans 5, 6, 7, 8, 9, 10, 11, will all be shutdown while we investigate the cause of the alarms.
We will send an update when we have more information.
We had a POCl alarm and Silane alarm go off in separate two exhausted cabinets at ~2:05pm today above the Tylan LPCVD furnaces. The sensors in the breathing zone did not detect anything.
We are waiting for the levels in those two cabinets to return to normally before letting users re-enter the lab.
We expect to let everyone back in at 3:00pm.
The Tylans 5, 6, 7, 8, 9, 10, 11, will all be shutdown while we investigate the cause of the alarms.
We will send an update when we have more information.
FW: Attached Image
Dear Mary,
Attached is the latest form that I’ve been handing out to Staff Lab members that qualify and want to take advantage of the EHS benefit. This form was sent to me by John Clark of Essilor Laboratories. Are we now working with 3M and not Essilor? Can you please let me know when this all occurred? Also, should I now direct all qualified Staff Lab members to:
http://www.stanford.edu/dept/EHS/prod/mainrencon/occhealth/PrescriptionSafetyGlasses.html instead of handing out the form like I’ve been doing for the last 9 years? Lastly, in the last 3 or 4 months I’ve had at least 4 or 5 qualified SNF Staff employees update their prescription lab glasses so what happens to the difference between $200.00 and $140.00?
Thank you for your time in this matter.
Sincerely,
Maureen
From: cis-147-copier@eemail.stanford.edu [mailto:cis-147-copier@eemail.stanford.edu]
Sent: Tuesday, July 24, 2012 1:17 PM
To: mbaran@stanford.edu
Subject: Attached Image
DRIE process vendors
Dear Labmembers,
I am looking for some DRIE etcher that can etch large area, shallow circles (e.g. 2000 um radius, 10 um deep) with good within-wafer uniformity. (< 5% depth variation) -- I don't quite care about the sidewall profile or other issues, but just etch rate control and uniformity.
Unfortunately, our STS1 or STS2 wasn't able to give me good enough uniformity.
If you know any vendors providing the DRIE etch service, or other facilities having a good DRIE etcher that I can possibly have access to, can you please let me know?
I'll probably start with sending out some test wafers (or go there personally) to etch and then check out the uniformity.
I'll probably start with sending out some test wafers (or go there personally) to etch and then check out the uniformity.
Thank you~
Min-Chieh
--
--
--------------------------------------------------
Min-Chieh Ho
Ginzton Lab
Stanford University
Ph.D. Candidate, Dept. of Electrical Engineering
minchieh@stanford.edu
Min-Chieh Ho
Ginzton Lab
Stanford University
Ph.D. Candidate, Dept. of Electrical Engineering
minchieh@stanford.edu
Re: <100um Thick Si Wafers?
Virgina Semiconductors
http://www.virginiasemi.com/?cont_uid=18
I have never dealt with them.
good luck,
jim
From: Matt Cherry <mcherry1@stanford.edu>
To: labmembers@snf.stanford.edu
Sent: Tuesday, July 24, 2012 10:09 AM
Subject: <100um Thick Si Wafers?
Hello Labmembers,
I am hoping that someone has a spare Si wafer of 100um or less thickness. In fact, just a piece ~1cm sq. would do. Barring that, does anyone have a favorite vendor for such wafers?
Thanks for your help,
Matt Cherry
I am hoping that someone has a spare Si wafer of 100um or less thickness. In fact, just a piece ~1cm sq. would do. Barring that, does anyone have a favorite vendor for such wafers?
Thanks for your help,
Matt Cherry
Disk usage ... an update ...
SNF Lab Members:
Some of you have sent me email stating: Person X is gone ...
While I appreciate your willingness to help, we try to be somewhat
systematic about removing lab members.
Here is what we do (and we do this annually):
If someone shows no Coral activity (equipment use, reservations,
inventory check outs, subscriptions, etc) for the last 3 years truncated
to the start of the year (that is 01-JAN-2009), we then dump all of
their files to tertiary storage, deactivate them, remove them from
things like mailing lists, etc. I am doing this housekeeping (with a
series of scripts) as I type this. It takes a number of hours to
complete ...
You might think that 3 years is too long a period to wait, but you'd be
surprised by the number of folks that come back either working for a
company, as a faculty member or post-doc at another institution, even
after they have "left".
In any event, this is a more convenient way of "cleaning up" in bulk and
gives us fewer places to look for old records if/when someone shows back
up after more than 3 years looking for something.
Some of you have also written to say "I don't keep any files" on the
Coral computers. If you don't, but you still show up on the over-100MB
list, that usually means that you have a big Firefox (or Mozilla) cache
or have downloaded things like videos. For example, some of you likely
have local stored copies of various SNF training videos (say,
delrin_tweezers.wmv, sgv.wmv, etc). Since those files are always
available at our web site, you don't need a local copy and deleting
those local copies of Windows Media Viewer files helps everyone.
Thanks for you continued support,
John
Some of you have sent me email stating: Person X is gone ...
While I appreciate your willingness to help, we try to be somewhat
systematic about removing lab members.
Here is what we do (and we do this annually):
If someone shows no Coral activity (equipment use, reservations,
inventory check outs, subscriptions, etc) for the last 3 years truncated
to the start of the year (that is 01-JAN-2009), we then dump all of
their files to tertiary storage, deactivate them, remove them from
things like mailing lists, etc. I am doing this housekeeping (with a
series of scripts) as I type this. It takes a number of hours to
complete ...
You might think that 3 years is too long a period to wait, but you'd be
surprised by the number of folks that come back either working for a
company, as a faculty member or post-doc at another institution, even
after they have "left".
In any event, this is a more convenient way of "cleaning up" in bulk and
gives us fewer places to look for old records if/when someone shows back
up after more than 3 years looking for something.
Some of you have also written to say "I don't keep any files" on the
Coral computers. If you don't, but you still show up on the over-100MB
list, that usually means that you have a big Firefox (or Mozilla) cache
or have downloaded things like videos. For example, some of you likely
have local stored copies of various SNF training videos (say,
delrin_tweezers.wmv, sgv.wmv, etc). Since those files are always
available at our web site, you don't need a local copy and deleting
those local copies of Windows Media Viewer files helps everyone.
Thanks for you continued support,
John
<100um Thick Si Wafers?
Hello Labmembers,
I am hoping that someone has a spare Si wafer of 100um or less thickness. In fact, just a piece ~1cm sq. would do. Barring that, does anyone have a favorite vendor for such wafers?
Thanks for your help,
Matt Cherry
I am hoping that someone has a spare Si wafer of 100um or less thickness. In fact, just a piece ~1cm sq. would do. Barring that, does anyone have a favorite vendor for such wafers?
Thanks for your help,
Matt Cherry
Re: Disk usage ...
i know the following to not be active members of the lab:
223553 oisaadat
209474 lrweiss
205018 rparsa
174586 me342e
169673 me342d
166899 altug
156708 me342a
152164 me342b
124254 barlian
123120 iwjung
122479 rhenn
118982 kattsai
114926 maryamzm
111569 kupnik
110613 yoneoka
i am sure there are many more inactive or abandoned accounts that i'm not aware on this list.
209474 lrweiss
205018 rparsa
174586 me342e
169673 me342d
166899 altug
156708 me342a
152164 me342b
124254 barlian
123120 iwjung
122479 rhenn
118982 kattsai
114926 maryamzm
111569 kupnik
110613 yoneoka
i am sure there are many more inactive or abandoned accounts that i'm not aware on this list.
j
On Tue, Jul 24, 2012 at 8:35 AM, John Shott <shott@stanford.edu> wrote:
SNF Lab Members:
We are, once again, nearly out of disk space. Yesterday, we were so close to that limit that our computers were responding slowly. In fact, I received several reports that "Coral was not working ..." Coral was 100% functional and available.
You can help by cleaning up unused files.
Here is hte list of folks that are using more than 100 MB of space on our machine in decreasing order of usage listed in kilobytes. While SNF staff have more cause to have significant disk usage, I'm hopeful that everyone will look at their own usage and clean up where appropriate.
If you want to look at more details of your own usage, you can issue the command:
du -sk * | more
This will list the size of each file or directory in kilobytes. If one of your directories is large, you can enter it with 'cd some_directory' and repeat the above command. In that way you should be able to find your biggest files and determine if you need to store them on this machine.
In the meantime, I will be looking at the annual "wiping" of directories for people who have not been active in SNF for some time.
Thanks for your consideration .... here is the list.
John
1785905 jwc
1463301 bchui
605636 lichenkolo
556427 pnataraj
536540 mtan
470665 cchen86
452643 chen0622
434553 popomoo
434455 mdickey
431054 jperez
395105 vossough
380529 gunjim
361154 khoang
357350 mcvittie
357302 kosarb
355191 eenriquez
338853 mvikram
337839 lyjiao
333085 naiqian
330231 maurice
314096 cmfaulkn
313348 romana
301852 cbellew
273499 dkozak
273188 mislam
268227 ywidjaja
264686 chongxie
264017 faridz
258374 megrubbs
257547 calarrudo
250718 zpatel
249501 trejo10
246276 insun
243524 ntayebi
242393 eata
234815 hopcroft
229468 alsune
223553 oisaadat
221802 gyama
220069 kokab
212676 svo
209474 lrweiss
205018 rparsa
201297 king
201032 dxu
199017 liangjl
198148 junil
196863 renshen
195717 takuyan
192855 haiwei
192356 mrlin
192146 daesung
188845 ocakkaya
183330 jtsai
182552 rostam
181368 hrleebh
180755 wanki
180282 arion
179974 joem
178602 ybkim
178459 ryw
175583 sipark
174586 me342e
174522 asanders4
172073 sghanbari
169835 clu
169733 sarahb4671
169687 marklee
169673 me342d
169478 ofidaner
168796 eward
168556 ee410d
168516 axiu
168281 ghyrn
168237 jnhagemeier
166899 altug
165993 gth
165177 narii
163917 ytcheng
163264 mcherry
161971 dasgupta
161021 pponce
160209 fpurkl
160207 wslee
159864 cmcg
159693 jiehuang
158621 gerke
157730 dongrip
157516 jasonlin
156708 me342a
156151 cursive
156061 dalyx
155963 johana
155672 yoonjin
155421 sdogbe
155222 dwnam
154191 jennyhu
152802 jacain
152729 junjun
152164 me342b
152118 jfoster
151912 jsnapp
151892 haniff
150667 lindaw
150049 djwong
149908 tester
149271 cbaxter
148741 jhaydon
148326 aeonia
146869 clee58
146053 zzp
144153 ajamo
143822 jtaylor
142276 mtang
141956 kghadiri
141850 ludwig
141553 kavehm
141031 waqasm
139525 xzhuan1
139298 dgunning
139252 alexneu
138751 ericp
138590 srikantv
137451 dongl
136404 malekos
135831 dniemann
135079 cechang
133366 nharjee
132469 zeyuan
132468 xuanwu
131255 jackson
129923 pbrink
129460 masaharu
129028 ebeh
128750 kimsangb
128685 ahazeghi
128662 rrick
127034 kcbalram
126472 spaik1
126167 ysohn
125342 levi
125322 jcdoll
124254 barlian
123864 vilanova
123120 iwjung
122960 wangss
122614 mnakamura
122493 carini
122479 rhenn
122113 oliversw
122030 okilic
121449 elibol
120950 zeost
120884 ginel
120535 rshyam
119843 takane
119445 damodei
119381 sclaussen
119186 fungus
118982 kattsai
118769 grupp
117862 bclee79
117762 zguo
117264 mcp
116883 aditya
116617 mlacour
116555 fatihs
116523 ylinn
115522 yongli
114926 maryamzm
114902 skoh
114864 fanzeng
114683 yiyang
114405 lwchang
114404 dfulgencio
114376 grahamab
114353 mbendernagel
114238 tomada
113533 fanpy
112466 evander
112370 latta
112350 karthikv
111979 yinliu
111960 bdai
111956 jeh0513
111915 lennonl
111569 kupnik
111558 uli
111393 nppatil
110763 mihirt
110757 vijayn
110665 flannery
110613 yoneoka
110210 eperalta
109248 alexxu
109116 cduchat
108586 tazryu78
108496 laurahughes
107625 patlu
107231 whlee
106856 taotang
106839 edfei
106826 biyang
106567 chovic99
106289 npapte
105702 tberg
105449 krivoire
105223 dton
105048 vishal
104612 tholme
104584 shuluc
104298 mattm3
103873 mandysin
103856 ylyang
103849 yhngchen
103574 joongsun
102600 hazeghi
102499 mferrier
102173 jaehlee
101891 amoini
101829 anu
101814 chienyuc
101274 vijayp
101184 ycjun
Disk usage ...
SNF Lab Members:
We are, once again, nearly out of disk space. Yesterday, we were so
close to that limit that our computers were responding slowly. In fact,
I received several reports that "Coral was not working ..." Coral was
100% functional and available.
You can help by cleaning up unused files.
Here is hte list of folks that are using more than 100 MB of space on
our machine in decreasing order of usage listed in kilobytes. While SNF
staff have more cause to have significant disk usage, I'm hopeful that
everyone will look at their own usage and clean up where appropriate.
If you want to look at more details of your own usage, you can issue the
command:
du -sk * | more
This will list the size of each file or directory in kilobytes. If one
of your directories is large, you can enter it with 'cd some_directory'
and repeat the above command. In that way you should be able to find
your biggest files and determine if you need to store them on this machine.
In the meantime, I will be looking at the annual "wiping" of directories
for people who have not been active in SNF for some time.
Thanks for your consideration .... here is the list.
John
1785905 jwc
1463301 bchui
605636 lichenkolo
556427 pnataraj
536540 mtan
470665 cchen86
452643 chen0622
434553 popomoo
434455 mdickey
431054 jperez
395105 vossough
380529 gunjim
361154 khoang
357350 mcvittie
357302 kosarb
355191 eenriquez
338853 mvikram
337839 lyjiao
333085 naiqian
330231 maurice
314096 cmfaulkn
313348 romana
301852 cbellew
273499 dkozak
273188 mislam
268227 ywidjaja
264686 chongxie
264017 faridz
258374 megrubbs
257547 calarrudo
250718 zpatel
249501 trejo10
246276 insun
243524 ntayebi
242393 eata
234815 hopcroft
229468 alsune
223553 oisaadat
221802 gyama
220069 kokab
212676 svo
209474 lrweiss
205018 rparsa
201297 king
201032 dxu
199017 liangjl
198148 junil
196863 renshen
195717 takuyan
192855 haiwei
192356 mrlin
192146 daesung
188845 ocakkaya
183330 jtsai
182552 rostam
181368 hrleebh
180755 wanki
180282 arion
179974 joem
178602 ybkim
178459 ryw
175583 sipark
174586 me342e
174522 asanders4
172073 sghanbari
169835 clu
169733 sarahb4671
169687 marklee
169673 me342d
169478 ofidaner
168796 eward
168556 ee410d
168516 axiu
168281 ghyrn
168237 jnhagemeier
166899 altug
165993 gth
165177 narii
163917 ytcheng
163264 mcherry
161971 dasgupta
161021 pponce
160209 fpurkl
160207 wslee
159864 cmcg
159693 jiehuang
158621 gerke
157730 dongrip
157516 jasonlin
156708 me342a
156151 cursive
156061 dalyx
155963 johana
155672 yoonjin
155421 sdogbe
155222 dwnam
154191 jennyhu
152802 jacain
152729 junjun
152164 me342b
152118 jfoster
151912 jsnapp
151892 haniff
150667 lindaw
150049 djwong
149908 tester
149271 cbaxter
148741 jhaydon
148326 aeonia
146869 clee58
146053 zzp
144153 ajamo
143822 jtaylor
142276 mtang
141956 kghadiri
141850 ludwig
141553 kavehm
141031 waqasm
139525 xzhuan1
139298 dgunning
139252 alexneu
138751 ericp
138590 srikantv
137451 dongl
136404 malekos
135831 dniemann
135079 cechang
133366 nharjee
132469 zeyuan
132468 xuanwu
131255 jackson
129923 pbrink
129460 masaharu
129028 ebeh
128750 kimsangb
128685 ahazeghi
128662 rrick
127034 kcbalram
126472 spaik1
126167 ysohn
125342 levi
125322 jcdoll
124254 barlian
123864 vilanova
123120 iwjung
122960 wangss
122614 mnakamura
122493 carini
122479 rhenn
122113 oliversw
122030 okilic
121449 elibol
120950 zeost
120884 ginel
120535 rshyam
119843 takane
119445 damodei
119381 sclaussen
119186 fungus
118982 kattsai
118769 grupp
117862 bclee79
117762 zguo
117264 mcp
116883 aditya
116617 mlacour
116555 fatihs
116523 ylinn
115522 yongli
114926 maryamzm
114902 skoh
114864 fanzeng
114683 yiyang
114405 lwchang
114404 dfulgencio
114376 grahamab
114353 mbendernagel
114238 tomada
113533 fanpy
112466 evander
112370 latta
112350 karthikv
111979 yinliu
111960 bdai
111956 jeh0513
111915 lennonl
111569 kupnik
111558 uli
111393 nppatil
110763 mihirt
110757 vijayn
110665 flannery
110613 yoneoka
110210 eperalta
109248 alexxu
109116 cduchat
108586 tazryu78
108496 laurahughes
107625 patlu
107231 whlee
106856 taotang
106839 edfei
106826 biyang
106567 chovic99
106289 npapte
105702 tberg
105449 krivoire
105223 dton
105048 vishal
104612 tholme
104584 shuluc
104298 mattm3
103873 mandysin
103856 ylyang
103849 yhngchen
103574 joongsun
102600 hazeghi
102499 mferrier
102173 jaehlee
101891 amoini
101829 anu
101814 chienyuc
101274 vijayp
101184 ycjun
We are, once again, nearly out of disk space. Yesterday, we were so
close to that limit that our computers were responding slowly. In fact,
I received several reports that "Coral was not working ..." Coral was
100% functional and available.
You can help by cleaning up unused files.
Here is hte list of folks that are using more than 100 MB of space on
our machine in decreasing order of usage listed in kilobytes. While SNF
staff have more cause to have significant disk usage, I'm hopeful that
everyone will look at their own usage and clean up where appropriate.
If you want to look at more details of your own usage, you can issue the
command:
du -sk * | more
This will list the size of each file or directory in kilobytes. If one
of your directories is large, you can enter it with 'cd some_directory'
and repeat the above command. In that way you should be able to find
your biggest files and determine if you need to store them on this machine.
In the meantime, I will be looking at the annual "wiping" of directories
for people who have not been active in SNF for some time.
Thanks for your consideration .... here is the list.
John
1785905 jwc
1463301 bchui
605636 lichenkolo
556427 pnataraj
536540 mtan
470665 cchen86
452643 chen0622
434553 popomoo
434455 mdickey
431054 jperez
395105 vossough
380529 gunjim
361154 khoang
357350 mcvittie
357302 kosarb
355191 eenriquez
338853 mvikram
337839 lyjiao
333085 naiqian
330231 maurice
314096 cmfaulkn
313348 romana
301852 cbellew
273499 dkozak
273188 mislam
268227 ywidjaja
264686 chongxie
264017 faridz
258374 megrubbs
257547 calarrudo
250718 zpatel
249501 trejo10
246276 insun
243524 ntayebi
242393 eata
234815 hopcroft
229468 alsune
223553 oisaadat
221802 gyama
220069 kokab
212676 svo
209474 lrweiss
205018 rparsa
201297 king
201032 dxu
199017 liangjl
198148 junil
196863 renshen
195717 takuyan
192855 haiwei
192356 mrlin
192146 daesung
188845 ocakkaya
183330 jtsai
182552 rostam
181368 hrleebh
180755 wanki
180282 arion
179974 joem
178602 ybkim
178459 ryw
175583 sipark
174586 me342e
174522 asanders4
172073 sghanbari
169835 clu
169733 sarahb4671
169687 marklee
169673 me342d
169478 ofidaner
168796 eward
168556 ee410d
168516 axiu
168281 ghyrn
168237 jnhagemeier
166899 altug
165993 gth
165177 narii
163917 ytcheng
163264 mcherry
161971 dasgupta
161021 pponce
160209 fpurkl
160207 wslee
159864 cmcg
159693 jiehuang
158621 gerke
157730 dongrip
157516 jasonlin
156708 me342a
156151 cursive
156061 dalyx
155963 johana
155672 yoonjin
155421 sdogbe
155222 dwnam
154191 jennyhu
152802 jacain
152729 junjun
152164 me342b
152118 jfoster
151912 jsnapp
151892 haniff
150667 lindaw
150049 djwong
149908 tester
149271 cbaxter
148741 jhaydon
148326 aeonia
146869 clee58
146053 zzp
144153 ajamo
143822 jtaylor
142276 mtang
141956 kghadiri
141850 ludwig
141553 kavehm
141031 waqasm
139525 xzhuan1
139298 dgunning
139252 alexneu
138751 ericp
138590 srikantv
137451 dongl
136404 malekos
135831 dniemann
135079 cechang
133366 nharjee
132469 zeyuan
132468 xuanwu
131255 jackson
129923 pbrink
129460 masaharu
129028 ebeh
128750 kimsangb
128685 ahazeghi
128662 rrick
127034 kcbalram
126472 spaik1
126167 ysohn
125342 levi
125322 jcdoll
124254 barlian
123864 vilanova
123120 iwjung
122960 wangss
122614 mnakamura
122493 carini
122479 rhenn
122113 oliversw
122030 okilic
121449 elibol
120950 zeost
120884 ginel
120535 rshyam
119843 takane
119445 damodei
119381 sclaussen
119186 fungus
118982 kattsai
118769 grupp
117862 bclee79
117762 zguo
117264 mcp
116883 aditya
116617 mlacour
116555 fatihs
116523 ylinn
115522 yongli
114926 maryamzm
114902 skoh
114864 fanzeng
114683 yiyang
114405 lwchang
114404 dfulgencio
114376 grahamab
114353 mbendernagel
114238 tomada
113533 fanpy
112466 evander
112370 latta
112350 karthikv
111979 yinliu
111960 bdai
111956 jeh0513
111915 lennonl
111569 kupnik
111558 uli
111393 nppatil
110763 mihirt
110757 vijayn
110665 flannery
110613 yoneoka
110210 eperalta
109248 alexxu
109116 cduchat
108586 tazryu78
108496 laurahughes
107625 patlu
107231 whlee
106856 taotang
106839 edfei
106826 biyang
106567 chovic99
106289 npapte
105702 tberg
105449 krivoire
105223 dton
105048 vishal
104612 tholme
104584 shuluc
104298 mattm3
103873 mandysin
103856 ylyang
103849 yhngchen
103574 joongsun
102600 hazeghi
102499 mferrier
102173 jaehlee
101891 amoini
101829 anu
101814 chienyuc
101274 vijayp
101184 ycjun
Sunday, July 22, 2012
Re: Problem p5000etch SNF 2012-07-21 16:47:45: Wafer stuck on robot blade
Reovered wafer from robot blade. Adjusted wafer handoff from
cassette elevator to storage elevator. Checked and verified
wafer handoff.
cassette elevator to storage elevator. Checked and verified
wafer handoff.
Saturday, July 21, 2012
Problem p5000etch SNF 2012-07-21 16:47:45: Wafer stuck on robot blade
Software thinks it's already in the cassette. I tried following the stop and recover procedure outlined in the binder. The last step (return wafers to cassette) didn't seem to work, so the wafer is still on the robot blade.
Was running CH. B. NIT-SPACER on Chamber B for 4 min 35 sec. Have one wafer in the system. Process successfully run. Wafer is double-polished, thickness is around 360um. No resist. 340nm nitride on top of 750nm oxide on back side of the wafer. The other side was just etched and should have no films.
Was running CH. B. NIT-SPACER on Chamber B for 4 min 35 sec. Have one wafer in the system. Process successfully run. Wafer is double-polished, thickness is around 360um. No resist. 340nm nitride on top of 750nm oxide on back side of the wafer. The other side was just etched and should have no films.
Friday, July 20, 2012
Re: Shutdown p5000etch SNF 2012-07-20 15:15:53: wafer stuck between elevator and cassette
System locked up had to do c cold resest to recovered the
tool. I cycled 1 wafer each to all three w/out problem.
tool. I cycled 1 wafer each to all three w/out problem.
Need Si wafer pieces, ASAP
Hi All,
We quickly need some pieces (5-7mm) of: Si (111), doped with resistivity smaller than 10 milliOhm-cm (the lower the better). We would like to have BOTH, p-plus and n-plus doped, but either one would be a good start.
If you have small pieces to spare, or if you know a source for us to quickly get hold of, please let me know. Thank you!
suhas
Introduction of Brett Huff and Michelle Rincon
Dear Lab members:
We have added two staff this summer to support the lab: Mr. Brett Huff and Dr. Michelle Rincon. They sit in the same office at 144 Allen.
Michelle is a Process Development Engineer and her first areas of responsibility will be ALD and CMP. While Dr. J Provine is still here for us to consult with, Michelle will be gradually taking over ownership of the tools, processes and training for the 3 existing ALDs and helping with the start-up of the next 2. She will also be slowly taking ownership of the CMP tool from Dr. Ed Myers, who also will still be around to support the tool & processes with his expert input. She is a part of the Renovation 2 team that will be replacing our wet benches over the next 3 years.
Michelle’s background includes 9 years at Intel/Numonyx (the Intel/ST Flash Memory spin-off) where she focused on process development primarily for flash memory down to the 45nm node. She developed batch and single wafer cleans and transferred them to high volume manufacturing sites within the US, Europe, and Asia.
Most recently, Michelle spent a couple of years at a start-up focused on using nano materials to make lithium ion battery components. Her educational background is in Chemical Engineering with her PhD from Penn State and her BS from Northwestern.
Brett is now the SNF Cleanroom Manager and his position involves three main priorities: safety, process tool availability and cleanroom micro-contamination. Brett is also chairing our more formalized Change Control Board (CCB)/Spec Mat committee, meeting every Friday. Elmer, Gary, Ted and Jim H., are all now supervised by Brett is his position to insure the cleanroom and the process tools stay safely operational.
Brett served 21.5 years at Intel. The first 7 years were spent in process module development for PECVD thin films applications. The next 7 years were spent doing process integration, primarily mid section/contact modules and back end dielectrics and polish. Brett moved to Intel Capital for 3 years where he worked to integrate a highly reflective Al layer into an existing Intel Cu technology for the purpose of selective projection displays. His final years were spent in Q&R working on yield issues and change control procedures. Brett comes to SNF from 2 years of fab management at SRI International in Menlo Park. He holds an Engineering BS from the University of Minnesota.
Brett’s extension is x4-0847 and Michelle’s is x5-0307. Feel free to drop by and introduce yourself to either or both in the offices or in the fab. And please make them feel welcome coming to Stanford.
Regards,
John Bumgarner
Operations Director
Shutdown p5000etch SNF 2012-07-20 15:15:53: wafer stuck between elevator and cassette
Not sure if it has to do with the thickness of the wafer (360um DP), but my wafer was on its way out and it is just sitting on the wall in the gate between the elevator and the cassette. Screen gives the following error: "The load chamber task did not acknowledge the sequencer." I put out some clean sheets. Alternatively, wafer can be put into slot 1 of my cassette box. Thanks!
Tuesday, July 17, 2012
Oral Exam Announcement: Waqas Mustafeez
From: Student Services
Sent: Monday, July 16, 2012 10:17 AM
Subject: [ee-doctorate] Oral Exam Announcement: Waqas Mustafeez
Abstract
Waqas Mustafeez
Date and time: 2PM (1:45PM Refreshments) Friday, 20th July 2012
Location: CISX Auditorum
Advisor: Alberto Salleo
Silicon Nanocrystals, Dust to Gold: Material, Devices and Synthesis
Over the past half century silicon has become a dominant material for electronics but it has remained a very poor optical material. Bandwidth limitations in electronics are currently being seen as a problem. A similar situation to what happened on the long haul transport where we switched from the copper pair to optical fiber communication, may occur at the chip scale through integration of cheap on-chip optical devices. We consider two ways forward for silicon to remain a relevant material for lightwave communication in this era despite challenges posed by the indirect gap and free carrier absorption. In specific, we look at silicon nanocrystals (Si-NC) as a light emitting material to show progress in turning this indirect gap material into an efficient emitter. First we show through a highly sensitive optical absorption spectroscopy technique (photothermal deflection spectroscopy) that the negative effective mass electron states in Si-NC shift down in energy thereby reducing the energy gap at the direct transition. This effect is responsible for low amounts of visible range emission reported in small crystals; as opposed to the emission from band gap minima at the X valley attributed with majority of the total emission. Thus we confirm through a direct measurement the minima in density of states at the Γ valley from splitting of the negative and positive effective mass states. We compare the shift in a few of these states with a model for quantum confinement in the nanocrystals surrounded by oxide using a simple parabolic potential well model.
We then show how resonant nanocavities should be optimized for low gain broad emitters like Si-NC. These cavities offer reduced mode volumes at the cost of quality factors such that "bad emitters" like Si-NC may couple with the cavity and ultimately offer a higher likelihood of observing Purcell enhancement. FDTD simulations show Q factors above 10^3 and mode volumes below 1(l/n)^3 in silicon rich oxide, which has a refractive index of only 1.7.
Finally we show a novel technique to make Si-NCs only on selected areas of the wafer: we direct-write tracks of silicon nanocrystals using a ps UV laser. It is possible to obtain 4 orders of magnitude throughput increase using this process as an alternative to oven annealing while also making localized nanocrystal precipitation a possibility. The tracks show emission enhancement over bare silicon rich oxide films and emission intensity comparable to that observed in conventionally-processed Si-NCs. We study variations in emission spectra, nanocluster phase and film stress across these tracks showing that ultimate limitation in throughput is film densification leading to compressive stress on the clusters that increases interfacial defects leading to emission quenching.
--
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Re: Problem p5000etch SNF 2012-07-16 23:40:11: Ch. A, metal timed
Red alarm is cause by NO CL2 flow..
Problem p5000etch SNF 2012-07-17 06:50:28: CL2
Problem with CL2 delivery. Run no Chlorine at this time
Monday, July 16, 2012
Problem p5000etch SNF 2012-07-16 23:40:11: Ch. A, metal timed
wafers got into the chamber A but a red flashing sign popped up saying, PROCESS STOPPED
we tried twice, no luck processing the wafer
recipe used, "metal timed"
other lab memebers tried their luck ....but was man vs. machine
and finally we gave up
Tx. for helping out the needy...
we tried twice, no luck processing the wafer
recipe used, "metal timed"
other lab memebers tried their luck ....but was man vs. machine
and finally we gave up
Tx. for helping out the needy...
Sunday, July 15, 2012
Etching nano-holes in metal?
Hey labmembers,
Has anyone etched nano grooves/holes/slit structures ~ 1um by 500nm in metal using any of the etching tools (MRC etcher etc. ) in SNF? I plan to pattern such small trenches in silver and then etch them using MRC etcher. It would be extremely useful to know if at all it is possible to etch metal from such small structures.
thanks,
--
~Vrinda
Vrinda Thareja
Ph.D. Candidate
Brongersma Group
Department of Materials Science and Engineering
Stanford University
Has anyone etched nano grooves/holes/slit structures ~ 1um by 500nm in metal using any of the etching tools (MRC etcher etc. ) in SNF? I plan to pattern such small trenches in silver and then etch them using MRC etcher. It would be extremely useful to know if at all it is possible to etch metal from such small structures.
thanks,
--
~Vrinda
Vrinda Thareja
Ph.D. Candidate
Brongersma Group
Department of Materials Science and Engineering
Stanford University
Saturday, July 14, 2012
Liquid spills around the emergency shower near the entrance door in the clean room.
Good morning, labmembers
When I came to the clean room around 10am today, I found that there were several liquid spills around the emergency shower near the entrance door.
Because the yellow cover was untied and all the liquid spills were right below and near the shower, someone might use it last night.
I assumed that the liquid was water,
but just in case, I wiped them with the yellow absorbent sheets and put them on the yellow hazard waste bag.
Because I didn't have any clear idea what it was, I wrote down 'suspicious liquid' on the waste tag.
I don't think we need any yellow warning chains or tapes around the place, and it looks normal now.
I hope it solves this issue.
Have a good weekend.
Best
Sangmoo
When I came to the clean room around 10am today, I found that there were several liquid spills around the emergency shower near the entrance door.
Because the yellow cover was untied and all the liquid spills were right below and near the shower, someone might use it last night.
I assumed that the liquid was water,
but just in case, I wiped them with the yellow absorbent sheets and put them on the yellow hazard waste bag.
Because I didn't have any clear idea what it was, I wrote down 'suspicious liquid' on the waste tag.
I don't think we need any yellow warning chains or tapes around the place, and it looks normal now.
I hope it solves this issue.
Have a good weekend.
Best
Sangmoo
Thursday, July 12, 2012
Re: Problem p5000etch SNF 2012-07-11 08:59:05: Ch. B pressure fault
Backing was low on oil, added quart of fomblin oil. Ran jim timed etch
recipe w/out problem.
recipe w/out problem.
Problem p5000etch SNF 2012-07-12 14:43:20: wafer got stuck at the gate to cassette
Process in chamber B completed and then the wafer got trapped at the gate between elevator and cassette during unloading. Fortunately, staff fixed it on the spot.
Wednesday, July 11, 2012
Comment p5000etch SNF 2012-07-11 09:13:49: Ch. B pressure seems fine now
Tried a few times and pressure seems to be able to stabilize now
Problem p5000etch SNF 2012-07-11 08:59:05: Ch. B pressure fault
Running recipe Ch. B Oxide. Unable to stabilize pressure and process was aborted
Tuesday, July 10, 2012
Glasses Found in the Gowning Room - Please Claim
Dear Labmembers,
If you are missing a pair of glasses and the last time you saw them were in the Gowning room – they are now sitting on my desk. please come and claim them at my cubicle #41.
Maureen
Monday, July 9, 2012
seeking spare/scrap 3 inch wafers
Hi Folks,
Does anybody have a few spare/scrap 3 inch wafers I could buy/have?
Doping & orientation are not important.
I am just going to use them to support my work through a plasma etch... The back side of my work will be temporarily bonded to them, so even if they have had some limited processing they may be ok...
Thanks,
Nate
Does anybody have a few spare/scrap 3 inch wafers I could buy/have?
Doping & orientation are not important.
I am just going to use them to support my work through a plasma etch... The back side of my work will be temporarily bonded to them, so even if they have had some limited processing they may be ok...
Thanks,
Nate
ion implanter
Hi all,
I wonder if somebody is aware of the availability of an ion implanter in campus. I am going to ion implant some Si TEM grids.
Thanks,
Hadiseh
I wonder if somebody is aware of the availability of an ion implanter in campus. I am going to ion implant some Si TEM grids.
Thanks,
Hadiseh
Tuesday, July 3, 2012
Sunday, July 1, 2012
Remot Coral fixes ... Part Deux
SNF Lab Members:
Several of you have indicated that the first purging of the application
did not work for you. While I've not seen detailed logs from those
failures, I've seen a couple that indicate an error message related to
the certificate that accompanies the third-party Jar file that comes
from th Legion of the Bouncy Castle (www.bouncycastle.org).
Here is what I suggest you do to force it to download a fresh version to
see if the problem goes away:
1. Fire up "javaws -viewer" again. from the "Run ..." item in the Start
menu.
2. In the Java Cache Viewer where it normally shows Applications, select
Show: Resources
3. That will show you all of the Jar files.
4. Click the "Name" heading on the leftmost column of that panel which
will alphabetize them.
5. Scroll down until you see provider.jar (note: there may be several of
them).
6. Assuming that there is more than one provider.jar listed, select the
top one on the list by clicking on that row and then move your mouse to
the bottom one and click again, but with the shift button held down.
This will select all instances of provider.jar.
7. After they are all selected, click the Red "X" at the top center of
that panel to delete all of them.
8. Then re-select the Applications item in the Show: box and select
Remote Coral (SNF) from the list of applications. Note: if you want to
re-add the desktop icon, click the icon that has the gray arrow pointing
up to the right. Then click the green arrow which will try to run
Remote Coral and should download a fresh version of provider.jar which,
I know to be properly signed.
Before it gets fully started, it should first download that file and
then may give you a Security Warning that asks "Do you want to run this
application?" (or something list that ...). You may have a "More
Information" link that you can click. If you follow that, it should
show you a certificate from the Legion of the Bouncy Castle. In any
event, back on the Security Warning panel is a Check Box for "I accept
the risk ...." that you should check and then there is a "Run" button.
I'm hopeful that this will get things started for you.
Good luck,
John
Several of you have indicated that the first purging of the application
did not work for you. While I've not seen detailed logs from those
failures, I've seen a couple that indicate an error message related to
the certificate that accompanies the third-party Jar file that comes
from th Legion of the Bouncy Castle (www.bouncycastle.org).
Here is what I suggest you do to force it to download a fresh version to
see if the problem goes away:
1. Fire up "javaws -viewer" again. from the "Run ..." item in the Start
menu.
2. In the Java Cache Viewer where it normally shows Applications, select
Show: Resources
3. That will show you all of the Jar files.
4. Click the "Name" heading on the leftmost column of that panel which
will alphabetize them.
5. Scroll down until you see provider.jar (note: there may be several of
them).
6. Assuming that there is more than one provider.jar listed, select the
top one on the list by clicking on that row and then move your mouse to
the bottom one and click again, but with the shift button held down.
This will select all instances of provider.jar.
7. After they are all selected, click the Red "X" at the top center of
that panel to delete all of them.
8. Then re-select the Applications item in the Show: box and select
Remote Coral (SNF) from the list of applications. Note: if you want to
re-add the desktop icon, click the icon that has the gray arrow pointing
up to the right. Then click the green arrow which will try to run
Remote Coral and should download a fresh version of provider.jar which,
I know to be properly signed.
Before it gets fully started, it should first download that file and
then may give you a Security Warning that asks "Do you want to run this
application?" (or something list that ...). You may have a "More
Information" link that you can click. If you follow that, it should
show you a certificate from the Legion of the Bouncy Castle. In any
event, back on the Security Warning panel is a Check Box for "I accept
the risk ...." that you should check and then there is a "Run" button.
I'm hopeful that this will get things started for you.
Good luck,
John
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