Make sure you hard bake the resist for at least 30 min at 110C.
Try using PadEtch, which is very benign to resist. I do not know if it etches HfOx, I never tried it before.
Pradeep
On Fri, Apr 6, 2012 at 5:06 PM, Max Shulaker <maxms@stanford.edu> wrote:
Hello all,
I hope everyone had a good week.
I was wondering if anyone had a fix for poor resist adhesion during a longer (15 minute) 6:1 BOE etch? I notice all of my resist features peel off after a few minutes. My substrate, if you are curious, is hafnium dioxide.
Thanks, and any help would be appreciated
Max
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