Friday, April 6, 2012

Hf etch resist adhesion

Hello all,
I hope everyone had a good week.
I was wondering if anyone had a fix for poor resist adhesion during a longer (15 minute) 6:1 BOE etch?  I notice all of my resist features peel off after a few minutes.  My substrate, if you are curious, is hafnium dioxide.
Thanks, and any help would be appreciated
Max

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