RE: polishing alumina / SiO2

Hello all,

I am also interested in knowing this. My samples are also small chips
(10x10mm) with SiO2 substrates. Instead of alumina, I would like to polish
samples covered with thin SiO2 (< 100nm spin-on-glass) with a similar rate
and surface roughness.
Thanks a lot for your help.

Yao-Te

-----Original Message-----
From: Francois Amet [mailto:amet@stanford.edu]
Sent: Wednesday, February 02, 2011 2:20 PM
To: labmembers@snf.stanford.edu
Subject: polishing alumina

Hi all,

I need to polish samples covered with alumina (ALD grown) down to 1nm rms
roughness or less. The underneath substrate is SiO2, and the etch rate of
alumina should be slow enough (a few nm per minute). The samples are small
chips (5x5mm or 15x15mm) Does anybody know a company in the bay area which
could do this job?
Thank you very much for your help!

Francois